Two-degree of freedom capacitive MEMS velocity sensor with two coupled electrically isolated mass-spring-damper systems
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2019 ◽
Vol 15
(1)
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pp. 112-116
2003 ◽
Vol 2003
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pp. _321-1_-_321-6_
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1975 ◽
Vol 97
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pp. 1175-1180
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Vol 88
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pp. 1-11
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2016 ◽
Vol 82
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Vol 131
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pp. 967-973
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