Novel Vertical Polysilicon Thin-Film Transistor with Excimer-Laser Annealing

2002 ◽  
Author(s):  
Ming-Zhen Lee ◽  
Chung-Len Lee ◽  
Tan-Fu Lei
Keyword(s):  
Thin Film ◽  
Excimer Laser ◽  
Laser Annealing ◽  
Thin Film Transistor ◽  
Excimer Laser Annealing

Enlargement of Poly-Si Film Grain Size by Excimer Laser Annealing and Its Application to High-Performance Poly-Si Thin Film Transistor

1991 ◽  
Vol 30 (Part 1, No. 12B) ◽  
pp. 3700-3703 ◽  
Author(s):  
Hiroyuki Kuriyama ◽  
Seiichi Kiyama ◽  
Shigeru Noguchi ◽  
Takashi Kuwahara ◽  
Satoshi Ishida ◽  
...  
Keyword(s):  
Thin Film ◽  
Grain Size ◽  
Excimer Laser ◽  
High Performance ◽  
Laser Annealing ◽  
Thin Film Transistor ◽  
Excimer Laser Annealing ◽  
Si Thin Film

Melt-mediated coalescence of solution-deposited ZnO nanoparticles by excimer laser annealing for thin-film transistor fabrication

2008 ◽  
Vol 94 (1) ◽  
pp. 111-115 ◽  
Author(s):  
Heng Pan ◽  
Nipun Misra ◽  
Seung H. Ko ◽  
Costas P. Grigoropoulos ◽  
Nate Miller ◽  
...  
Keyword(s):  
Thin Film ◽  
Excimer Laser ◽  
Zno Nanoparticles ◽  
Laser Annealing ◽  
Thin Film Transistor ◽  
Excimer Laser Annealing ◽  
Transistor Fabrication

Novel Vertical Polysilicon Thin-Film Transistor with Excimer-Laser Annealing

2003 ◽  
Vol 42 (Part 1, No. 4B) ◽  
pp. 2123-2126 ◽  
Author(s):  
Ming-Zhen Lee ◽  
Chung-Len Lee ◽  
Tan-Fu Lei
Keyword(s):  
Thin Film ◽  
Excimer Laser ◽  
Laser Annealing ◽  
Thin Film Transistor ◽  
Excimer Laser Annealing
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