Excimer Laser Annealing for Low-Temperature Polysilicon Thin Film Transistor Fabrication on Plastic Substrates

2007 ◽  
Author(s):  
G. Fortunato ◽  
A. Pecora ◽  
L. Maiolo ◽  
M. Cuscuna ◽  
D. Simeone ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Excimer Laser ◽  
Laser Annealing ◽  
Thin Film Transistor ◽  
Excimer Laser Annealing ◽  
Plastic Substrates ◽  
Transistor Fabrication

Melt-mediated coalescence of solution-deposited ZnO nanoparticles by excimer laser annealing for thin-film transistor fabrication

2008 ◽  
Vol 94 (1) ◽  
pp. 111-115 ◽  
Author(s):  
Heng Pan ◽  
Nipun Misra ◽  
Seung H. Ko ◽  
Costas P. Grigoropoulos ◽  
Nate Miller ◽  
...  
Keyword(s):  
Thin Film ◽  
Excimer Laser ◽  
Zno Nanoparticles ◽  
Laser Annealing ◽  
Thin Film Transistor ◽  
Excimer Laser Annealing ◽  
Transistor Fabrication

Enlargement of Poly-Si Film Grain Size by Excimer Laser Annealing and Its Application to High-Performance Poly-Si Thin Film Transistor

1991 ◽  
Vol 30 (Part 1, No. 12B) ◽  
pp. 3700-3703 ◽  
Author(s):  
Hiroyuki Kuriyama ◽  
Seiichi Kiyama ◽  
Shigeru Noguchi ◽  
Takashi Kuwahara ◽  
Satoshi Ishida ◽  
...  
Keyword(s):  
Thin Film ◽  
Grain Size ◽  
Excimer Laser ◽  
High Performance ◽  
Laser Annealing ◽  
Thin Film Transistor ◽  
Excimer Laser Annealing ◽  
Si Thin Film

Excimer Laser Annealing of PbZr0.4Ti0.6O3 Thin Film at Low Temperature

2006 ◽  
Vol E89-C (10) ◽  
pp. 1460-1464 ◽  
Author(s):  
W. XIANYU ◽  
H. S.-y. CHO ◽  
J. Y. KWON ◽  
H. YIN ◽  
T. NOGUCHI
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Excimer Laser ◽  
Laser Annealing ◽  
Excimer Laser Annealing
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