Impact of Homogeneously Dispersed Al Nanoclusters by Si-monolayer Insertion into Hf0.5Zr0.5O2 Film on FeFET Memory Array with Tight Threshold Voltage Distribution

Author(s):  
K. Maekawa ◽  
T. Yamashita ◽  
T. Yamaguchi ◽  
T. Ohara ◽  
A. Amo ◽  
...  
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