Impact of Homogeneously Dispersed Al Nanoclusters by Si-monolayer Insertion into Hf0.5Zr0.5O2 Film on FeFET Memory Array with Tight Threshold Voltage Distribution
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2014 ◽
Vol 62
(4)
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pp. 919-927
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2016 ◽
Vol 63
(9)
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pp. 3527-3532
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2011 ◽
Vol 58
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pp. 3712-3719
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