Low-Temperature Plasma-Oxidation Process for Reliable Tantalum-Oxide (TaO) Decoupling Capacitors
Keyword(s):
1996 ◽
Vol 92
(18)
◽
pp. 3425
◽
Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):
1984 ◽
Vol 2
(2)
◽
pp. 496-499
◽
Keyword(s):