Piezoelectric properties of PZT thick film on Si prepared by an interfacial polymerization method

2002 ◽  
Author(s):  
T. Tsurumi ◽  
S. Ozawa ◽  
S. Wada ◽  
M. Yamane
Keyword(s):  
Thick Film ◽  
Piezoelectric Properties ◽  
Interfacial Polymerization ◽  
Polymerization Method ◽  
Pzt Thick Film

Preparation of Pb(Zr0.53Ti0.47)O3Thick Films by an Interfacial Polymerization Method on Silicon Substrates and Their Electric and Piezoelectric Properties

2000 ◽  
Vol 39 (Part 1, No. 9B) ◽  
pp. 5604-5608 ◽  
Author(s):  
Takaaki Tsurumi ◽  
Shuichi Ozawa ◽  
Goro Abe ◽  
Naoki Ohashi ◽  
Satoshi Wada ◽  
...  
Keyword(s):  
Piezoelectric Properties ◽  
Interfacial Polymerization ◽  
Silicon Substrates ◽  
Polymerization Method

scholarly journals Formation of PZT Thick Film Single Elements Using EHDA Deposition

2009 ◽  
Vol 628-629 ◽  
pp. 405-410 ◽  
Author(s):  
Da Zhi Wang ◽  
R.A. Dorey
Keyword(s):  
Thick Film ◽  
Relative Permittivity ◽  
Ultrasonic Transducer ◽  
Sol Gel ◽  
Etching Process ◽  
Single Element ◽  
Electrohydrodynamic Atomization ◽  
Fringe Effect ◽  
Pzt Thick Film

In this paper, electrohydrodynamic atomization combined with a polymeric micromoulding technique was used to form PZT single element devices using a PZT sol-gel slurry without an etching process. The PZT single element device was initially designed to work as a piezoelectric ultrasonic transducer consisting of a circular or a square of various sizes, which was produced and used to evaluate the process. The resulting PZT device had a homogenous microstructure. It was observed that the relative permittivity of the circular and square single element devices was especially high at small size due to the fringe effect. The results show that the radius and width of the PZT single circular and square element devices with a thickness of 15µm should be bigger than 400µm in order to reduce the fringe effect.

scholarly journals Preparation and characterization of PZT thick film enhanced by ZnO nanowhiskers for MEMS piezoelectric generators

2011 ◽  
Vol 21 (2) ◽  
pp. 159-163 ◽  
Author(s):  
Zhong-xia DUAN ◽  
Guo-qin YU ◽  
Jun-biao LIU ◽  
Jun LIU ◽  
Xiao-wen DONG ◽  
...  
Keyword(s):  
Thick Film ◽  
Pzt Thick Film

scholarly journals Transferred PMN-PT Thick Film on Conductive Silver Epoxy

Materials ◽  
2018 ◽  
Vol 11 (9) ◽  
pp. 1621 ◽  
Author(s):  
Tao Zhang ◽  
Jun Ou-Yang ◽  
Xiaofei Yang ◽  
Benpeng Zhu
Keyword(s):  
Thick Film ◽  
Silicon Substrate ◽  
Chemical Method ◽  
Piezoelectric Properties ◽  
Sol Gel ◽  
Wet Chemical Method ◽  
Chemical Route ◽  
Wet Chemical ◽  
Silver Epoxy ◽  
Ferroelectric And Piezoelectric Properties

Approximately 25 μm Pb(Mg1/3Nb2/3)O3–PbTiO3 (PMN-PT) thick film was synthesized based on a sol-gel/composite route. The obtained PMN-PT thick film was successfully transferred from the Silicon substrate to the conductive silver epoxy using a novel wet chemical method. The mechanism of this damage free transfer was explored and analyzed. Compared with the film on Silicon substrate, the transferred one exhibited superior dielectric, ferroelectric and piezoelectric properties. These promising results indicate that transferred PMN-PT thick film possesses the capability for piezoelectric device application, especially for ultrasound transducer fabrication. Most importantly, this chemical route opens a new path for transfer of thick film.

High performance PZT thick film actuators using in plane polarisation

2015 ◽  
Vol 114 (4) ◽  
pp. 237-242 ◽  
Author(s):  
D. Ernst ◽  
B. Bramlage ◽  
S. E. Gebhardt ◽  
A. J. Schönecker
Keyword(s):  
Thick Film ◽  
High Performance ◽  
Pzt Thick Film
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