The mechanical sensitivity optimization of a disk resonator gyroscope with mutative ring thickness

2016 ◽  
Author(s):  
Xin Zhou ◽  
Qingsong Li ◽  
Dingbang Xiao ◽  
Zhanqiang Hou ◽  
Zhihua Chen ◽  
...  
Keyword(s):  
Mechanical Sensitivity ◽  
Disk Resonator

Design of a Disk Resonator Gyroscope With High Mechanical Sensitivity by Optimizing the Ring Thickness Distribution

2016 ◽  
Vol 25 (4) ◽  
pp. 606-616 ◽  
Author(s):  
Dingbang Xiao ◽  
Xin Zhou ◽  
Qingsong Li ◽  
Zhanqiang Hou ◽  
Xiang Xi ◽  
...  
Keyword(s):  
Thickness Distribution ◽  
Mechanical Sensitivity ◽  
Disk Resonator

An investigation on the ring thickness distribution of disk resonator gyroscope with high mechanical sensitivity

2016 ◽  
Vol 117 ◽  
pp. 174-181 ◽  
Author(s):  
Xin Zhou ◽  
Yulie Wu ◽  
Dingbang Xiao ◽  
Zhanqiang Hou ◽  
Qingsong Li ◽  
...  
Keyword(s):  
Thickness Distribution ◽  
Mechanical Sensitivity ◽  
Disk Resonator

scholarly journals Design of Wideband Bandpass Filter Based on Corrugated Disk Resonator with Multiple Resonant Modes

Materials ◽  
2021 ◽  
Vol 14 (10) ◽  
pp. 2614
Author(s):  
Qian Yang ◽  
Shuangyang Liu ◽  
Hongyu Shi ◽  
Kai-Da Xu ◽  
Xinyue Dai ◽  
...  
Keyword(s):  
Theoretical Analysis ◽  
Bandpass Filter ◽  
Design Method ◽  
Center Frequency ◽  
Localized Surface Plasmons ◽  
Metallic Structure ◽  
Disk Resonator ◽  
Resonant Frequencies ◽  
Resonant Modes ◽  
Via Holes

A corrugated disk resonator with eight grooves is proposed for wideband bandpass filter (BPF) design. Due to the spoof localized surface plasmons resonances of the corrugated metallic structure, the dipole, quadrupole, hexapole modes, and a fundamental mode excited by the introduced short-circuited via holes are employed to realize four transmission poles (TPs) in the passband. The theoretical analysis is described by the electric field and current distributions on the resonator. The resonant frequencies can be tuned easily by the parameters of the structure, which can be used to adjust the center frequency and bandwidth of the BPF freely. Furthermore, two resonators are cascaded to obtain eight TPs to improve the selectivity performance. Finally, three fabricated filters demonstrate the design method.

scholarly journals Design and optimization of differential capacitive micro accelerometer for vibration measurement

2021 ◽  
Vol 30 (1) ◽  
pp. 19-27
Author(s):  
Kumar Gomathi ◽  
Arunachalam Balaji ◽  
Thangaraj Mrunalini
Keyword(s):  
Software Design ◽  
Proof Mass ◽  
Vibration Measurement ◽  
Design Parameters ◽  
Mechanical Sensitivity ◽  
Design And Optimization ◽  
Capacitive Accelerometer ◽  
Cross Axis ◽  
Micro Accelerometer

Abstract This paper deals with the design and optimization of a differential capacitive micro accelerometer for better displacement since other types of micro accelerometer lags in sensitivity and linearity. To overcome this problem, a capacitive area-changed technique is adopted to improve the sensitivity even in a wide acceleration range (0–100 g). The linearity is improved by designing a U-folded suspension. The movable mass of the accelerometer is designed with many fingers connected in parallel and suspended over the stationary electrodes. This arrangement gives the differential comb-type capacitive accelerometer. The area changed capacitive accelerometer is designed using Intellisuite 8.6 Software. Design parameters such as spring width and radius, length, and width of the proof mass are optimized using Minitab 17 software. Mechanical sensitivity of 0.3506 μm/g and Electrical sensitivity of 4.706 μF/g are achieved. The highest displacement of 7.899 μm is obtained with a cross-axis sensitivity of 0.47%.

A Wafer-level Vacuum Packaged MEMS Disk Resonator Gyroscope with 0.42/h Bias Instability within 300/s Full Scale

2021 ◽  
pp. 1-1
Author(s):  
Hao Wang ◽  
Haiyang Quan ◽  
Jinqiu Zhou ◽  
Long Zhang ◽  
Jianbing Xie ◽  
...  
Keyword(s):  
Full Scale ◽  
Wafer Level ◽  
Disk Resonator ◽  
Bias Instability
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