scholarly journals Design and optimization of differential capacitive micro accelerometer for vibration measurement

2021 ◽  
Vol 30 (1) ◽  
pp. 19-27
Author(s):  
Kumar Gomathi ◽  
Arunachalam Balaji ◽  
Thangaraj Mrunalini
Keyword(s):  
Software Design ◽  
Proof Mass ◽  
Vibration Measurement ◽  
Design Parameters ◽  
Mechanical Sensitivity ◽  
Design And Optimization ◽  
Capacitive Accelerometer ◽  
Cross Axis ◽  
Micro Accelerometer

Abstract This paper deals with the design and optimization of a differential capacitive micro accelerometer for better displacement since other types of micro accelerometer lags in sensitivity and linearity. To overcome this problem, a capacitive area-changed technique is adopted to improve the sensitivity even in a wide acceleration range (0–100 g). The linearity is improved by designing a U-folded suspension. The movable mass of the accelerometer is designed with many fingers connected in parallel and suspended over the stationary electrodes. This arrangement gives the differential comb-type capacitive accelerometer. The area changed capacitive accelerometer is designed using Intellisuite 8.6 Software. Design parameters such as spring width and radius, length, and width of the proof mass are optimized using Minitab 17 software. Mechanical sensitivity of 0.3506 μm/g and Electrical sensitivity of 4.706 μF/g are achieved. The highest displacement of 7.899 μm is obtained with a cross-axis sensitivity of 0.47%.

A Novel Z-Axis Capacitance Accelerometer with Highly Symmetrical 16-Beam Structure

2013 ◽  
Vol 562-565 ◽  
pp. 412-416
Author(s):  
Wei Li ◽  
Lu Feng Che ◽  
Xiao Lin Li ◽  
Jian Wu ◽  
Yue Lin Wang
Keyword(s):  
Proof Mass ◽  
Differential Capacitance ◽  
Wet Etching ◽  
Beam Structure ◽  
Element Analysis ◽  
Bias Stability ◽  
Maximum Range ◽  
Cross Axis ◽  
Highly Uniform ◽  
Micro Accelerometer

A novel highly symmetrical 16-beam sandwich structure Z-axis differential capacitance accelerometer is presented. In this design, the proof mass is suspended symmetrically by double-side of 16 straight beams with highly uniform dimension which can reduce the cross-axis sensitivity and rotational influences dramatically. Parameters of the beam-mass structure were analyzed and optimized by finite element analysis (FEA) software. The micro accelerometer is based on bulk-micromachining by DRIE and KOH anisotropic wet etching technologies. The beam-mass structure was released by anisotropic wet etching on both device layer sides simultaneously. The fabricated accelerometer was measured over the maximum range of 30g gravity field, results of measurement show that the close-loop sensitivity is 80mV/g, the nonlinearity is 0.27%, and the bias stability is 0.63mg for an hour.

A two degrees of freedom comb capacitive-type accelerometer with low cross-axis sensitivity

2019 ◽  
Vol 13 (3) ◽  
pp. 5334-5346
Author(s):  
M. N. Nguyen ◽  
L. Q. Nguyen ◽  
H. M. Chu ◽  
H. N. Vu
Keyword(s):  
Degrees Of Freedom ◽  
Proof Mass ◽  
Vibration Modes ◽  
Electrode Structure ◽  
Element Analysis ◽  
Mechanical Coupling ◽  
Fully Differential ◽  
Mode Effects ◽  
The Finite Element Analysis ◽  
Cross Axis

In this paper, we report on a SOI-based comb capacitive-type accelerometer that senses acceleration in two lateral directions. The structure of the accelerometer was designed using a proof mass connected by four folded-beam springs, which are compliant to inertial displacement causing by attached acceleration in the two lateral directions. At the same time, the folded-beam springs enabled to suppress cross-talk causing by mechanical coupling from parasitic vibration modes. The differential capacitor sense structure was employed to eliminate common mode effects. The design of gap between comb fingers was also analyzed to find an optimally sensing comb electrode structure. The design of the accelerometer was carried out using the finite element analysis. The fabrication of the device was based on SOI-micromachining. The characteristics of the accelerometer have been investigated by a fully differential capacitive bridge interface using a sub-fF switched-capacitor integrator circuit. The sensitivities of the accelerometer in the two lateral directions were determined to be 6 and 5.5 fF/g, respectively. The cross-axis sensitivities of the accelerometer were less than 5%, which shows that the accelerometer can be used for measuring precisely acceleration in the two lateral directions. The accelerometer operates linearly in the range of investigated acceleration from 0 to 4g. The proposed accelerometer is expected for low-g applications.

scholarly journals Geometric Design-based Dimensional Synthesis of a Novel Metamorphic Multi-fingered Hand with Maximal Workspace

2021 ◽  
Vol 34 (1) ◽  
Author(s):  
Wei An ◽  
Jun Wei ◽  
Xiaoyu Lu ◽  
Jian S. Dai ◽  
Yanzeng Li
Keyword(s):  
Geometric Design ◽  
Practical Significance ◽  
Design Parameters ◽  
Control Algorithms ◽  
Discretization Method ◽  
Dimensional Synthesis ◽  
Symmetrical Structure ◽  
Design And Optimization ◽  
Total Length

AbstractCurrent research on robotic dexterous hands mainly focuses on designing new finger and palm structures, as well as developing smarter control algorithms. Although the dimensional synthesis of dexterous hands with traditional rigid palms has been carried out, research on the dimensional synthesis of dexterous hands with metamorphic palms remains insufficient. This study investigated the dimensional synthesis of a palm of a novel metamorphic multi-fingered hand, and explored the geometric design for maximizing the precision manipulation workspace. Different indexes were used to value the workspace of the metamorphic hand, and the best proportions between the five links of the palm to obtain the optimal workspace of the metamorphic hand were explored. Based on the fixed total length of the palm member, four nondimensional design parameters that determine the size of the palm were introduced; through the discretization method, the influence of the four design parameters on the workspace of the metamorphic hand with full-actuated fingers and under-actuated fingers was analyzed. Based on the analysis of the metamorphic multi-fingered hand, the symmetrical structure of the palm was designed, resulting in the largest workspace of the multi-fingered hand, and proved that the metamorphic palm has a massive upgrade for the workspace of underactuated fingers. This research contributed to the dimensional synthesis of metamorphic dexterous hands, with practical significance for the design and optimization of novel metamorphic hands.

Design and optimization of bump (compression surface) for diverterless supersonic inlet

2021 ◽  
pp. 095441002110029
Author(s):  
Irsalan Arif ◽  
Hassan Iftikhar ◽  
Ali Javed
Keyword(s):  
Fitness Function ◽  
Supersonic Jet ◽  
Three Dimensional ◽  
Flow Characteristics ◽  
Least Square ◽  
Pressure Recovery ◽  
Design Parameters ◽  
Inlet System ◽  
Design And Optimization ◽  
Supersonic Inlet

In this article design and optimization scheme of a three-dimensional bump surface for a supersonic aircraft is presented. A baseline bump and inlet duct with forward cowl lip is initially modeled in accordance with an existing bump configuration on a supersonic jet aircraft. Various design parameters for bump surface of diverterless supersonic inlet systems are identified, and design space is established using sensitivity analysis to identify the uncertainty associated with each design parameter by the one-factor-at-a-time approach. Subsequently, the designed configurations are selected by performing a three-level design of experiments using the Box–Behnken method and the numerical simulations. Surrogate modeling is carried out by the least square regression method to identify the fitness function, and optimization is performed using genetic algorithm based on pressure recovery as the objective function. The resultant optimized bump configuration demonstrates significant improvement in pressure recovery and flow characteristics as compared to baseline configuration at both supersonic and subsonic flow conditions and at design and off-design conditions. The proposed design and optimization methodology can be applied for optimizing the bump surface design of any diverterless supersonic inlet system for maximizing the intake performance.

A New Design of a Piezoelectric Triaxial Micro-Accelerometer

2015 ◽  
Vol 645-646 ◽  
pp. 841-846 ◽  
Author(s):  
Jian Yan Wang ◽  
Ting Ting Wang ◽  
Hang Guo
Keyword(s):  
Simulation Analysis ◽  
Structural Parameters ◽  
Sol Gel ◽  
Triaxial Accelerometer ◽  
Response Frequency ◽  
Pzt Films ◽  
New Type ◽  
The Cross ◽  
Cross Axis ◽  
Micro Accelerometer

Accelerometer in MEMS always is made by capacitive or piezoresistive, whose dynamic response is not good, the operating frequency is narrow, and the cross-axis sensitivity is low. A new type of piezoelectric micro-accelerometer is designed, and its structure is “x” type. The sensing unit is piezoelectric PZT films, which is achieved by sol-gel method. The accelerometer is a triaxial accelerometer. The theoretical and simulation analysis is used to achieve the charge sensitivity and response frequency, and also get the optimal structural parameters. A new circuit connection is proposed to improve the sensitivity and avoid the cross-axis sensitivity. The design achieves the z-axis sensitivity with more than 40 pC/g, x, y-axis sensitivity with more than 8pC/g, and the response frequency is about 3000Hz.

Design, Analysis and System-Level Modelling of a Single Axis Capacitive Accelerometer

2016 ◽  
Author(s):  
Zakriya Mohammed ◽  
Owais Talaat Waheed ◽  
Ibrahim (Abe) M. Elfadel ◽  
Aveek Chatterjee ◽  
Mahmoud Rasras
Keyword(s):  
Nuclear Power ◽  
Power Plants ◽  
Noise Analysis ◽  
Linear Displacement ◽  
Operating Conditions ◽  
System Level ◽  
Complete Analysis ◽  
Capacitive Accelerometer ◽  
Static Capacitance ◽  
Cross Axis

The paper demonstrates the design and complete analysis of 1-axis MEMS capacitive accelerometer. The design is optimized for high linearity, high sensitivity, and low cross-axis sensitivity. The noise analysis is done to assure satisfactory performance under operating conditions. This includes the mechanical noise of accelerometer, noise due to interface electronics and noise caused by radiation. The latter noise will arise when such accelerometer is deployed in radioactive (e.g., nuclear power plants) or space environments. The static capacitance is calculated to be 4.58 pF/side. A linear displacement sensitivity of 0.012μm/g (g = 9.8m/s2) is observed in the range of ±15g. The differential capacitive sensitivity of the device is 90fF/g. Furthermore, a low cross-axis sensitivity of 0.024fF/g is computed. The effect of radiation is mathematically modelled and possibility of using these devices in radioactive environment is explored. The simulated noise floor of the device with electronic circuit is 0.165mg/Hz1/2.

Parameter Design of Conformal PML Based on 2D Monostatic RCS Optimization

2021 ◽  
Vol 36 (6) ◽  
pp. 726-733
Author(s):  
Yongjie Zhang ◽  
Xiaofeng Deng
Keyword(s):  
Electromagnetic Scattering ◽  
Simulated Annealing Algorithm ◽  
Design Method ◽  
Optimization Method ◽  
Parameter Design ◽  
Design Parameters ◽  
Absorption Effect ◽  
Absorbing Boundary ◽  
Design And Optimization ◽  
Annealing Algorithm

In this study, 2D finite element (FE) solving process with the conformal perfectly matched layer (PML) is elucidated to perform the electromagnetic scattering computation. With the 2D monostatic RCS as the optimization objective, a sensitivity analysis of the basic design parameters of conformal PML (e.g., layer thickness, loss factor, extension order and layer number) is conducted to identify the major parameters of conformal PML that exerts more significant influence on 2D RCS. Lastly, the major design parameters of conformal PML are optimized by the simulated annealing algorithm (SA). As revealed from the numerical examples, the parameter design and optimization method of conformal PML based on SA is capable of enhancing the absorption effect exerted by the conformal PML and decreasing the error of the RCS calculation. It is anticipated that the parameter design method of conformal PML based on RCS optimization can be applied to the cognate absorbing boundary and 3D electromagnetic computation.

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