Linear Bilayer ALD Coated MEMS Varactor With High Tuning Capacitance Ratio
2009 ◽
Vol 18
(1)
◽
pp. 147-153
◽
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2015 ◽
Vol 10
(4)
◽
pp. 1720-1725
◽
1998 ◽
Vol 45
(7)
◽
pp. 890-894
◽
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