Analytical analysis and finite element simulation of advanced membranes for silicon microphones
2014 ◽
Vol 635-637
◽
pp. 228-232
Keyword(s):
2011 ◽
Vol 258
(5)
◽
pp. 1750-1755
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Keyword(s):
2015 ◽
Vol 1
(2)
◽
pp. 57-65
2011 ◽
Keyword(s):
2013 ◽
Vol 4
(2)
◽
pp. 113-121
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