Development of Silicon Nanowire-Based NEMS Absolute Pressure Sensor Through Surface Micromachining

2017 ◽  
Vol 38 (5) ◽  
pp. 653-656 ◽  
Author(s):  
Songsong Zhang ◽  
Liang Lou ◽  
Yuandong Alex Gu
Author(s):  
Mehmet Mersinligil ◽  
Jean-Franc¸ois Brouckaert ◽  
Julien Desset

This paper presents the first experimental engine and test rig results obtained from a fast response cooled total pressure probe. The first objective of the probe design was to favor continuous immersion of the probe into the engine to obtain time series of pressure with a high bandwidth and therefore statistically representative average fluctuations at the blade passing frequency. The probe is water cooled by a high pressure cooling system and uses a conventional piezo-resistive pressure sensor which yields therefore both time-averaged and time-resolved pressures. The initial design target was to gain the capability of performing measurements at the temperature conditions typically found at high pressure turbine exit (1100–1400K) with a bandwidth of at least 40kHz and in the long term at combustor exit (2000K or higher). The probe was first traversed at the turbine exit of a Rolls-Royce Viper turbojet engine, at exhaust temperatures around 750 °C and absolute pressure of 2.1bars. The probe was able to resolve the high blade passing frequency (≈23kHz) and several harmonics up to 100kHz. Besides the average total pressure distributions from the radial traverses, phase-locked averages and random unsteadiness are presented. The probe was also used in a virtual three-hole mode yielding unsteady yaw angle, static pressure and Mach number. The same probe was used for measurements in a Rolls-Royce intermediate pressure burner rig. Traverses were performed inside the flame tube of a kerosene burner at temperatures above 1600 °C. The probe successfully measured the total pressure distribution in the flame tube and typical frequencies of combustion instabilities were identified during rumble conditions. The cooling performance of the probe is compared to estimations at the design stage and found to be in good agreement. The frequency response of the probe is compared to cold shock tube results and a significant increase in the natural frequency of the line-cavity system formed by the conduction cooled screen in front of the miniature pressure sensor were observed.


1999 ◽  
Author(s):  
Todd F. Miller ◽  
David J. Monk ◽  
Gary O’Brien ◽  
William P. Eaton ◽  
James H. Smith

Abstract Surface micromachining is becoming increasingly popular for microelectromechanical systems (MEMS) and a new application for this process technology is pressure sensors. Uncompensated surface micromachined piezoresistive pressure sensors were fabricated by Sandia National Labs (SNL). Motorola packaged and tested the sensors over pressure, temperature and in a typical circuit application for noise characteristics. A brief overview of surface micromachining related to pressure sensors is described in the report along with the packaging and testing techniques used. The electrical data found is presented in a comparative manner between the surface micromachined SNL piezoresistive polysilicon pressure sensor and a bulk micromachined Motorola piezoresistive single crystal silicon pressure sensor.


2006 ◽  
Vol 34 ◽  
pp. 393-398 ◽  
Author(s):  
Kang Ryeol Lee ◽  
Kunnyun Kim ◽  
Hyo-Derk Park ◽  
Yong Kook Kim ◽  
Seung-Woo Choi ◽  
...  

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