Internal Stress Effect On Nonlinearity of Absolute Pressure Sensor
Fabricated With Single-Sided Surface-Micromachining Processes
Keyword(s):
2017 ◽
Vol 38
(5)
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pp. 653-656
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2003 ◽
Vol 125
(4)
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pp. 470-474
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Keyword(s):
1999 ◽
1997 ◽
Vol 36
(Part 1, No. 6A)
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pp. 3558-3563
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2006 ◽
Vol 34
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pp. 393-398
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