Ultra trace analysis and electrical characterization of Cu diffusion through thin quasi-amorphous Ta-N-O barriers
2018 ◽
Vol 33
(5)
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pp. 730-737
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Keyword(s):
Keyword(s):
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1983 ◽
Vol 55
(12)
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pp. 2017-2022
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2014 ◽
Vol 113
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pp. 69-76
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Keyword(s):
2017 ◽
Vol 89
(17)
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pp. 8638-8642
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2005 ◽
Vol 382
(7)
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pp. 1500-1506
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