Abstract
Nanomechanical mass spectrometry is a recent technological breakthrough that enables the real-time analysis of single molecules. In contraposition to its extreme mass sensitivity is a limited capture cross-section that can hinder measurements in a practical setting. Here we show that weak-coupling between devices in resonator arrays can be used in nanomechanical mass spectrometry to parallelize the measurement. This coupling gives rise to asymmetric amplitude peaks in the vibrational response of a single nanomechanical resonator of the array, which coincide with the natural frequencies of all other resonators in the same array. A rigorous theoretical model is derived that explains the physical mechanisms and describes the practical features of this parallelization. We demonstrate the significance of this parallelization through inertial imaging of analytes adsorbed to all resonators of an array, with the possibility of simultaneously detecting resonators placed at distances a hundred times larger than their own physical size.
A Low-g MEMS Accelerometer with High Sensitivity, Low Nonlinearity and Large Dynamic Range Based on Mode-Localization of 3-DoF Weakly Coupled Resonators
