Contactless measurement of thin metallic films

Author(s):  
V. Papez ◽  
S. Papezova
Author(s):  
J. Silcox ◽  
R. H. Wade

Recent work has drawn attention to the possibilities that small angle electron scattering offers as a source of information about the micro-structure of vacuum condensed films. In particular, this serves as a good detector of discontinuities within the films. A review of a kinematical theory describing the small angle scattering from a thin film composed of discrete particles packed close together will be presented. Such a model could be represented by a set of cylinders packed side by side in a two dimensional fluid-like array, the axis of the cylinders being normal to the film and the length of the cylinders becoming the thickness of the film. The Fourier transform of such an array can be regarded as a ring structure around the central beam in the plane of the film with the usual thickness transform in a direction normal to the film. The intensity profile across the ring structure is related to the radial distribution function of the spacing between cylinders.


1991 ◽  
Vol 16 (6) ◽  
pp. 623-638 ◽  
Author(s):  
P.A. Badoz ◽  
F. Arnaud d'Avitaya ◽  
E. Rosencher

2018 ◽  
Author(s):  
Julia Sun ◽  
Benjamin Almquist

For decades, fabrication of semiconductor devices has utilized well-established etching techniques to create complex nanostructures in silicon. Of these, two of the most common are reactive ion etching in the gaseous phase and metal-assisted chemical etching (MACE) in the liquid phase. Though these two methods are highly established and characterized, there is a surprising scarcity of reports exploring the ability of metallic films to catalytically enhance the etching of silicon in dry plasmas via a MACE-like mechanism. Here, we discuss a <u>m</u>etal-<u>a</u>ssisted <u>p</u>lasma <u>e</u>tch (MAPE) performed using patterned gold films to catalyze the etching of silicon in an SF<sub>6</sub>/O<sub>2</sub> mixed plasma, selectively increasing the rate of etching by over 1000%. The degree of enhancement as a function of Au catalyst configuration and relative oxygen feed concentration is characterized, along with the catalytic activities of other common MACE metals including Ag, Pt, and Cu. Finally, methods of controlling the etch process are briefly explored to demonstrate the potential for use as a liquid-free fabrication strategy.


Shinku ◽  
1963 ◽  
Vol 6 (5) ◽  
pp. 182-188
Author(s):  
Hisashi HORIKOSHI ◽  
Noriko TAMURA
Keyword(s):  

Author(s):  
M. Kasemann ◽  
L.M. Reindl ◽  
B. Michl ◽  
W. Warta ◽  
A. Schütt ◽  
...  

Abstract Conventional series resistance imaging methods require electrical contacts for current injection or extraction in order to generate lateral current flow in the solar cell. This paper presents a new method to generate lateral current flow in the solar cell without any electrical contacts. This reduces the sample handling complexity for inline application and allows for measurements on unfinished solar cell precursors.


Author(s):  
Б. Дивинский ◽  
B. Divinskiy ◽  
И. Грюне ◽  
I. Gryune ◽  
Р. Косьян ◽  
...  

Acoustic methods belong to contactless measurement means, possess high spatial and time resolution. Thus, the use of multifrequency allows directly profile both concentration and granulometric structure of the suspended substances. In 2008 in the Big Wave Flume (Hanover, Germany) by efforts of the Russian and German scientists there have been carried out the experiment on studying the bottom material suspension laws under the influence of irregular waves. The Aquascat 1000 acoustic back scattering sensor (ABS) manufactured by British company Aquatec (www.aquatecsubsea.com), equipped by a three-frequency transmitter with frequencies 1,0, 2,0 and 3,84 MHz, has been set on distance of 0,75 m from the bottom and 111 m from wave generator at the total depth of 3,2 m. Several dozen series of measurements at various parameters of surface waves have been carried out. The general picture of suspension is so that the external dynamic influence (currents, wave movements, turbulence, gravitation forces) creates a non-uniform field (gradient) of the suspended particles and in most cases due to this the average size of particles undergoes to the spatial-time variations. For this reason while defining the mass concentration of suspended sediment, using the single frequency transmitter there is necessity for numerous definition of the suspension granulometric structure what by isn’t always possible. If two and more frequencies are used the observed results comparison can give the information on average diameters of particles and on that basis the calculation of suspended sediment concentration is possibleLet's emphasize the basic advantages of back scattering acoustic gauges usage: – Obtaining the particles sizes and concentration distribution profiles is possible; – The initial granulometric structure of bottom sediments can be unknown (at use of several frequencies). The following can be referred to some lacks of the device: – The system should be calibrated in laboratory conditions; – In a positive feedback conditions the iterative computing process can converge to zero or to infinity. In this case experiments with a variation of carrier frequencies chosen for the analysis allow partially solve the problem (say experiments with different frequencies pairs, as 2/1 of MHz or 4/2 MHz).


2007 ◽  
Vol 9 (10) ◽  
pp. 391-391 ◽  
Author(s):  
D Malterre ◽  
B Kierren ◽  
Y Fagot-Revurat ◽  
S Pons ◽  
A Tejeda ◽  
...  

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