A Stray-Insensitive Low-Power Capacitive Sensor Interface with Time-Compensation Technique

2021 ◽  
Author(s):  
Yixuan He ◽  
Yong-Bin Kim
Keyword(s):  
Low Power ◽  
Capacitive Sensor ◽  
Sensor Interface ◽  
Compensation Technique

scholarly journals Active Temperature compensation for MEMS capacitive sensor

2021 ◽  
Author(s):  
Cuong Do ◽  
Ashwin A. Seshia
Keyword(s):  
Energy Harvesting ◽  
Low Power ◽  
Temperature Variation ◽  
Temperature Compensation ◽  
Strain Sensor ◽  
Capacitive Sensor ◽  
Structure Design ◽  
Mems Sensors ◽  
Capacitive Strain ◽  
Active Temperature

Temperature variation is one of the most crucial factors that need to be cancelled in MEMS sensors. Many traditional methodologies require an additional circuit to compensate for temperature. This work describes a new active temperature compensation method for MEMS capacitive strain sensor without any additional circuit. The proposed method is based on a complement 2-D capacitive structure design. It consumes zero-power, which is essential toward the realization of a low-power temperature-compensated sensor in battery-powered or energy-harvesting applications<br>

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