A Fully Integrated Low-Power Capacitive Sensor Frontend with Automatic Tuning Scheme

Author(s):  
Mortaza Mojarad ◽  
Milad Diba
2002 ◽  
Author(s):  
Ronald E. Reedy ◽  
Hal Anthony ◽  
Charles Kuznia ◽  
Mike Pendelton ◽  
Jim Cable ◽  
...  

2014 ◽  
Vol 49 (8) ◽  
pp. 1682-1693 ◽  
Author(s):  
Seokhyeon Jeong ◽  
Zhiyoong Foo ◽  
Yoonmyung Lee ◽  
Jae-Yoon Sim ◽  
David Blaauw ◽  
...  

1998 ◽  
Vol 45 (4) ◽  
pp. 2272-2278 ◽  
Author(s):  
J. Vandenbussche ◽  
F. Leyn ◽  
G. Van der Plas ◽  
G. Gielen ◽  
W. Sansen

2021 ◽  
Author(s):  
Cuong Do ◽  
Ashwin A. Seshia

Temperature variation is one of the most crucial factors that need to be cancelled in MEMS sensors. Many traditional methodologies require an additional circuit to compensate for temperature. This work describes a new active temperature compensation method for MEMS capacitive strain sensor without any additional circuit. The proposed method is based on a complement 2-D capacitive structure design. It consumes zero-power, which is essential toward the realization of a low-power temperature-compensated sensor in battery-powered or energy-harvesting applications<br>


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