A high sensitivity quartz tuning fork temperature sensor

2009 ◽  
Author(s):  
Jun Xu ◽  
Bo You ◽  
Xin Li ◽  
Jing Ma
Keyword(s):  
Temperature Sensor ◽  
Tuning Fork ◽  
High Sensitivity ◽  
Quartz Tuning Fork

Design and Simulation of Quartz Tuning Fork Temperature Sensor

2007 ◽  
Author(s):  
Jun Xu ◽  
Bo You ◽  
Xin Li
Keyword(s):  
Temperature Sensor ◽  
Tuning Fork ◽  
Flexural Vibration ◽  
High Sensitivity ◽  
Quartz Tuning Fork ◽  
Experimental Investigations ◽  
Electrode Shape ◽  
Curve Fit ◽  
Resistance Value ◽  
Better Than

In order to optimize the design of quartz tuning fork temperature sensor, finite element method (FEM) is applied to model optimum tuning fork geometry, tine tip and tine surface electrode shape and thickness with a resonance frequency close to 32 kHz and a series resistance value of 40 kΩ as design targets. This type of sensor designed with a new ZYtw-cut is proved that working at flexural vibration mode was better than at the others modes. Precise temperature versus frequency analyses of resonators have been carried out and Least Mean Squared (LMS) curve fit algorithm is applied to compute the temperature values quantitatively. The results obtained from the experimental investigations show the method which synthesizes many factors to design quartz tuning-fork temperature sensor. Using ZYtw-cut can bring the temperature coefficient up to 70ppm/(degree C) and make power consumption lower. The temperature sensor based on quartz tuning-fork thermo-sensitive resonator is mounted in a standard holder for use from −30 degree C to 160 degree C with an accuracy of 0.05 degree C and a high resolution of 0.001 degree C. It is proved that it is possible to construct a miniature quartz tuning-fork temperature sensor with high sensitivity and small non-linearity.

scholarly journals Micro-Temperature Sensor Based on Quartz Tuning Fork Resonator

2013 ◽  
Vol 5 (4) ◽  
pp. 1232-1237 ◽  
Author(s):  
Jing Ma ◽  
Jun Xu ◽  
Jinhua Duan ◽  
Haibo Xu
Keyword(s):  
Temperature Sensor ◽  
Tuning Fork ◽  
Quartz Tuning Fork

A new low‐cost high‐performance quartz tuning‐fork temperature sensor

Sensor Review ◽  
2003 ◽  
Vol 23 (2) ◽  
pp. 134-142 ◽  
Author(s):  
He Jin ◽  
Chen Zhaoyang ◽  
Lin Jiang ◽  
Dai Jingmin
Keyword(s):  
Temperature Sensor ◽  
High Performance ◽  
Tuning Fork ◽  
Low Cost ◽  
Quartz Tuning Fork

scholarly journals Nanopipette/Nanorod-Combined Quartz Tuning Fork–Atomic Force Microscope

Sensors ◽  
2019 ◽  
Vol 19 (8) ◽  
pp. 1794 ◽  
Author(s):  
Sangmin An ◽  
Wonho Jhe
Keyword(s):  
Atomic Force Microscope ◽  
Tuning Fork ◽  
High Sensitivity ◽  
Quartz Tuning Fork ◽  
Force Sensor ◽  
Au Nanoparticle ◽  
Ambient Conditions ◽  
Atomic Force ◽  
In Situ Detection

We introduce a nanopipette/quartz tuning fork (QTF)–atomic force microscope (AFM) for nanolithography and a nanorod/QTF–AFM for nanoscratching with in situ detection of shear dynamics during performance. Capillary-condensed nanoscale water meniscus-mediated and electric field-assisted small-volume liquid ejection and nanolithography in ambient conditions are performed at a low bias voltage (~10 V) via a nanopipette/QTF–AFM. We produce and analyze Au nanoparticle-aggregated nanowire by using nanomeniscus-based particle stacking via a nanopipette/QTF–AFM. In addition, we perform a nanoscratching technique using in situ detection of the mechanical interactions of shear dynamics via a nanorod/QTF–AFM with force sensor capability and high sensitivity.

Development of an Ultra-Small Smart Temperature Sensor with Quartz Tuning Fork Resonators

2008 ◽  
Vol 47-50 ◽  
pp. 769-772 ◽  
Author(s):  
Jun Xu ◽  
Li Hua Hu ◽  
Jing Ma ◽  
Ju An Cui ◽  
Bo You
Keyword(s):  
Temperature Sensor ◽  
High Performance ◽  
Control Algorithm ◽  
Tuning Fork ◽  
Quartz Tuning Fork ◽  
Experimental Result ◽  
Sensing Element ◽  
Sensor Interface ◽  
And Control ◽  
Special Control

This paper discusses a smart temperature sensor system that comprises of a high performance quartz tuning fork temperature sensor, interface with CMOS circuitry and control algorithm for reconfiguration. The ideal thermo-sensitive cut for quartz tuning fork resonators is analyzed with the theory, and is optimized by FEM (Finite Element Method). The specific cut quartz tuning fork was fabricated using photolithography and the etching technology. And the tuning fork sensing element (4 3 2 . 0 1 mm × × ) is so small that can be housed in the capsule ( 6 2× Φ mm). The smart temperature sensor along with the interface IC to FPGA and special control algorithm may easily realize the sensor reconfiguration and the auto-calibration in the field. The experimental result indicates that the sensitivity of this sensor can reach C ppm o / 65 in the temperature range from-20 to 140 C o , it guarantees that precision is C o 01 . 0 , the resolution is C o 001 . 0 , and the response time is 1s.

scholarly journals Temperature Sensor Using Quartz Tuning Fork Resonator

1987 ◽  
Vol 23 (11) ◽  
pp. 1117-1122 ◽  
Author(s):  
Toshitsugu UEDA ◽  
Fusao KOHSAKA ◽  
Toshio IINO ◽  
Daisuke YAMAZAKI
Keyword(s):  
Temperature Sensor ◽  
Tuning Fork ◽  
Quartz Tuning Fork

Design, Development and Testing of Quartz Tuning Fork Temperature Sensor

2011 ◽  
Vol 483 ◽  
pp. 143-147
Author(s):  
Jing Ma ◽  
Jun Xu ◽  
Bo You
Keyword(s):  
Temperature Sensor ◽  
Tuning Fork ◽  
Low Cost ◽  
Quartz Tuning Fork ◽  
Design Development ◽  
Metal Electrodes ◽  
Crystalline Quartz ◽  
Flexural Mode ◽  
External Temperature ◽  
Satisfactory Performance

In this paper, a low cost quartz tuning fork temperature sensor adopting H-shaped tuning fork resonator to address miniaturization, high resolution and high stability has been designed, developed and tested. The quartz tuning temperature sensor is designed vibrating in flexural mode with a new thermo-sensitive cut. The quartz tuning fork temperature sensor consists of two prongs connected at one end of crystalline quartz plate with thin-film metal electrodes deposited on the faces, which is used to produce vibration in response to alternating voltages and detecting the resonance frequency in the meantime. When an external temperature is change, there is a shift in its natural frequency. Based on this principle, a resonant thermometer is designed. Finite element method is used to analyze the vibratory modes and optimize the structure. The whole structure is 500μm thickness, the length of tuning fork arm is 3076μm and the width of tuning fork arm is 600um, the frequency of tuning fork is about 37kHz with a sensitivity of rough 85 ppm/°C. The experimental results shown that a temperature accuracy of 0.01 °C and a resolution of 0.005 °C within temperature range from 0 °C to 100 °C. All these research are helpful to design satisfactory performance of the sensor for temperature measurement.

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