The Influence of Electrode on Elastic Constant $C_{33}{}^{D}$ Extraction of Scandium-doped Aluminum Nitride Thin Film by Thickness-extensional Mode FBAR
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1998 ◽
Vol 61
(1)
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pp. 107-118
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1999 ◽
Vol 146
(2)
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pp. 691-696
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