Inductively coupled plasma dry etching for nano structured III-V on Si lasers
1998 ◽
Vol 37
(Part 1, No. 12A)
◽
pp. 6655-6656
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2005 ◽
Vol 44
(7B)
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pp. 5811-5818
◽
Keyword(s):
2011 ◽
Vol 159
(1)
◽
pp. D26-D30
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1999 ◽
Vol 17
(4)
◽
pp. 2202-2208
◽
1999 ◽
Vol 17
(4)
◽
pp. 1174-1181
◽
Keyword(s):
Keyword(s):