X-ray imaging for electron cyclotron resonance processing plasmas

2005 ◽  
Author(s):  
K.H. Chew ◽  
J.L. Shohet ◽  
T.J. Castagna
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
X Ray ◽  
X Ray Imaging

Electron cyclotron resonance ion source plasma characterization by X-ray spectroscopy and X-ray imaging

2016 ◽  
Vol 87 (2) ◽  
pp. 02A510 ◽  
Author(s):  
David Mascali ◽  
Giuseppe Castro ◽  
Sándor Biri ◽  
Richárd Rácz ◽  
József Pálinkás ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Ion Source ◽  
Electron Cyclotron ◽  
X Ray ◽  
X Ray Imaging ◽  
Plasma Characterization
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