Investigation of low pressure capacitively coupled plasma behavior using PIC-MCC simulation

2011 Abstracts IEEE International Conference on Plasma Science ◽

10.1109/plasma.2011.5992903 ◽

2011 ◽

Author(s):

Kallol Bera ◽

Shahid Rauf ◽

Ken Collins

Keyword(s):

Low Pressure ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma ◽

Plasma Behavior

Download Full-text

Effect of driving frequency on the electron energy distribution function and electron-sheath interaction in a low pressure capacitively coupled plasma

Physics of Plasmas ◽

10.1063/1.4967356 ◽

2016 ◽

Vol 23 (11) ◽

pp. 110701 ◽

Author(s):

S. Sharma ◽

N. Sirse ◽

P. K. Kaw ◽

M. M. Turner ◽

A. R. Ellingboe

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Pressure ◽

Energy Distribution Function ◽

Driving Frequency ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

Download Full-text

Mode transition in an oxygen low-pressure, very high frequency (162 MHz), multi-tile electrode capacitively coupled plasma

Physics of Plasmas ◽

10.1063/5.0022844 ◽

2020 ◽

Vol 27 (11) ◽

pp. 110701

Author(s):

C. Harvey ◽

N. Sirse ◽

C. Gaman ◽

A. R. Ellingboe

Keyword(s):

High Frequency ◽

Low Pressure ◽

Mode Transition ◽

Very High Frequency ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma ◽

Download Full-text

Fluid modeling of electron heating in low-pressure, high-frequency capacitively coupled plasma discharges

Journal of Applied Physics ◽

10.1063/1.1818354 ◽

2004 ◽

Vol 96 (11) ◽

pp. 6073-6081 ◽

Author(s):

Guangye Chen ◽

Laxminarayan L. Raja

Keyword(s):

High Frequency ◽

Low Pressure ◽

Plasma Discharges ◽

Electron Heating ◽

Capacitively Coupled ◽

Fluid Modeling ◽

Capacitively Coupled Plasma

Download Full-text

Electron temperature measurements with a hairpin resonator probe in a pulsed low pressure capacitively coupled plasma

Plasma Sources Science and Technology ◽

10.1088/1361-6595/ac02b2 ◽

2021 ◽

Author(s):

David Peterson ◽

Yuhua Xiao ◽

Kristopher Ford ◽

Philip Kraus ◽

Steven Shannon

Keyword(s):

Electron Temperature ◽

Low Pressure ◽

Temperature Measurements ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma ◽

Hairpin Resonator

Download Full-text

Low Pressure RF Capacitively Coupled Plasma Reactor for Modification of Seeds, Polymers and Textile Fabrics

Materials Science Forum - Current Research in Advanced Materials and Processes ◽

10.4028/0-87849-971-7.291 ◽

2005 ◽

pp. 291-296 ◽

Author(s):

N. Puač ◽

Z.Lj. Petrović ◽

M. Radetić ◽

A. Djordjević

Keyword(s):

Plasma Reactor ◽

Low Pressure ◽

Capacitively Coupled ◽

Textile Fabrics ◽

Capacitively Coupled Plasma

Download Full-text

Energy distribution of electron flux at electrodes in a low pressure capacitively coupled plasma

Journal of Applied Physics ◽

10.1063/1.4774306 ◽

2013 ◽

Vol 113 (2) ◽

pp. 023306 ◽

Author(s):

Shahid Rauf ◽

Leonid Dorf ◽

Jason Kenney ◽

Ken Collins

Keyword(s):

Energy Distribution ◽

Electron Flux ◽

Low Pressure ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

Download Full-text

Temporal evolution of electron density in a low pressure pulsed two-frequency (60 MHz/2 MHz) capacitively coupled plasma discharge

Plasma Sources Science and Technology ◽

10.1088/0963-0252/23/6/065046 ◽

2014 ◽

Vol 23 (6) ◽

pp. 065046 ◽

Author(s):

N Sirse ◽

M H Jeon ◽

G Y Yeom ◽

A R Ellingboe

Keyword(s):

Electron Density ◽

Temporal Evolution ◽

Low Pressure ◽

Plasma Discharge ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

Download Full-text

Spatial evolution of the electron energy distribution function in a low-pressure capacitively coupled plasma containing argon and krypton

Plasma Sources Science and Technology ◽

10.1088/0963-0252/21/4/045009 ◽

2012 ◽

Vol 21 (4) ◽

pp. 045009 ◽

Author(s):

Xi-Ming Zhu ◽

Wen-Cong Chen ◽

Jiang Li ◽

Zhi-Wen Cheng ◽

Yi-Kang Pu

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Pressure ◽

Energy Distribution Function ◽

Spatial Evolution ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

Download Full-text

Effect of electron Monte Carlo collisions on a hybrid simulation of a low-pressure capacitively coupled plasma

Plasma Sources Science and Technology ◽

10.1088/0963-0252/23/6/065040 ◽

2014 ◽

Vol 23 (6) ◽

pp. 065040 ◽

Author(s):

Seok Won Hwang ◽

Ho-Jun Lee ◽

Hae June Lee

Keyword(s):

Monte Carlo ◽

Hybrid Simulation ◽

Low Pressure ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

Download Full-text

High frequency sheath modulation and higher harmonic generation in a low pressure very high frequency capacitively coupled plasma excited by sawtooth waveform

Plasma Sources Science and Technology ◽

10.1088/1361-6595/abbac2 ◽

2020 ◽

Vol 29 (11) ◽

pp. 114001

Author(s):

Sarveshwar Sharma ◽

Nishant Sirse ◽

Miles M Turner

Keyword(s):

Harmonic Generation ◽

High Frequency ◽

Low Pressure ◽

Very High Frequency ◽

Capacitively Coupled ◽

Higher Harmonic Generation ◽

Higher Harmonic ◽

Capacitively Coupled Plasma ◽

Very High ◽

Sawtooth Waveform

Download Full-text