Fluid modeling of electron heating in low-pressure, high-frequency capacitively coupled plasma discharges

Journal of Applied Physics ◽

10.1063/1.1818354 ◽

2004 ◽

Vol 96 (11) ◽

pp. 6073-6081 ◽

Author(s):

Guangye Chen ◽

Laxminarayan L. Raja

Keyword(s):

High Frequency ◽

Low Pressure ◽

Plasma Discharges ◽

Electron Heating ◽

Capacitively Coupled ◽

Fluid Modeling ◽

Capacitively Coupled Plasma

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Mode transition in an oxygen low-pressure, very high frequency (162 MHz), multi-tile electrode capacitively coupled plasma

Physics of Plasmas ◽

10.1063/5.0022844 ◽

2020 ◽

Vol 27 (11) ◽

pp. 110701

Author(s):

C. Harvey ◽

N. Sirse ◽

C. Gaman ◽

A. R. Ellingboe

Keyword(s):

High Frequency ◽

Low Pressure ◽

Mode Transition ◽

Very High Frequency ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma ◽

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High frequency sheath modulation and higher harmonic generation in a low pressure very high frequency capacitively coupled plasma excited by sawtooth waveform

Plasma Sources Science and Technology ◽

10.1088/1361-6595/abbac2 ◽

2020 ◽

Vol 29 (11) ◽

pp. 114001

Author(s):

Sarveshwar Sharma ◽

Nishant Sirse ◽

Miles M Turner

Keyword(s):

Harmonic Generation ◽

High Frequency ◽

Low Pressure ◽

Very High Frequency ◽

Capacitively Coupled ◽

Higher Harmonic Generation ◽

Higher Harmonic ◽

Capacitively Coupled Plasma ◽

Very High ◽

Sawtooth Waveform

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1-D Fluid Modeling of Methane Dissociation in Radiofrequency Capacitively Coupled Plasma

Renewable Energy for Smart and Sustainable Cities - Lecture Notes in Networks and Systems ◽

10.1007/978-3-030-04789-4_55 ◽

2018 ◽

pp. 516-522

Author(s):

Abdelatif Gadoum ◽

Djilali Benyoucef ◽

Mohamed Habib Allah Lahoual

Keyword(s):

Capacitively Coupled ◽

Fluid Modeling ◽

Capacitively Coupled Plasma ◽

Methane Dissociation

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Effect of driving frequency on the electron energy distribution function and electron-sheath interaction in a low pressure capacitively coupled plasma

Physics of Plasmas ◽

10.1063/1.4967356 ◽

2016 ◽

Vol 23 (11) ◽

pp. 110701 ◽

Author(s):

S. Sharma ◽

N. Sirse ◽

P. K. Kaw ◽

M. M. Turner ◽

A. R. Ellingboe

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Pressure ◽

Energy Distribution Function ◽

Driving Frequency ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

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Simulation Study of Hollow Cathode Enhanced Radio Frequency Capacitively Coupled Plasma Discharges

10.1109/icops35962.2018.9575977 ◽

2018 ◽

Author(s):

W. K. Tseng ◽

H. C. Chang ◽

C. Y. Chen ◽

K. C. Leou

Keyword(s):

Radio Frequency ◽

Simulation Study ◽

Hollow Cathode ◽

Plasma Discharges ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

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On electron heating in a low pressure capacitively coupled oxygen discharge

Journal of Applied Physics ◽

10.1063/1.5003971 ◽

2017 ◽

Vol 122 (19) ◽

pp. 193302 ◽

Author(s):

J. T. Gudmundsson ◽

D. I. Snorrason

Keyword(s):

Low Pressure ◽

Electron Heating ◽

Capacitively Coupled ◽

Oxygen Discharge

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Theoretical investigation of phase-controlled bias effect in capacitively coupled plasma discharges

Physics of Plasmas ◽

10.1063/1.3615029 ◽

2011 ◽

Vol 18 (7) ◽

pp. 073506 ◽

Author(s):

Deuk-Chul Kwon ◽

Jung-Sik Yoon

Keyword(s):

Theoretical Investigation ◽

Plasma Discharges ◽

Bias Effect ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

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Collisionless sheath heating in current-driven capacitively coupled plasma discharges via higher order sinusoidal signals

Plasma Sources Science and Technology ◽

10.1088/0963-0252/24/2/025037 ◽

2015 ◽

Vol 24 (2) ◽

pp. 025037 ◽

Author(s):

S Sharma ◽

S K Mishra ◽

P K Kaw ◽

A Das ◽

N Sirse ◽

...

Keyword(s):

Higher Order ◽

Plasma Discharges ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma ◽

Sinusoidal Signals

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Study of stochastic heating using particle-in-cell simulation in single frequency capacitively coupled plasma discharges

2012 Abstracts IEEE International Conference on Plasma Science ◽

10.1109/plasma.2012.6383392 ◽

2012 ◽

Author(s):

Sarveshwar Sharma ◽

Miles Turner

Keyword(s):

Single Frequency ◽

Plasma Discharges ◽

Capacitively Coupled ◽

Particle In Cell ◽

Stochastic Heating ◽

Cell Simulation ◽

Capacitively Coupled Plasma

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Simulation study of wave phenomena from the sheath region in single frequency capacitively coupled plasma discharges; field reversals and ion reflection

Physics of Plasmas ◽

10.1063/1.4816952 ◽

2013 ◽

Vol 20 (7) ◽

pp. 073507 ◽

Author(s):

S. Sharma ◽

M. M. Turner

Keyword(s):

Simulation Study ◽

Single Frequency ◽

Plasma Discharges ◽

Capacitively Coupled ◽

Sheath Region ◽

Capacitively Coupled Plasma ◽

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