Optical emission diagnostics of electron cyclotron resonance and glow discharge plasmas for a-Si:H and a-SiC:H film depositions
1992 ◽
Vol 10
(5)
◽
pp. 3119-3124
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2005 ◽
Vol 82
(1)
◽
pp. 35-43
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2019 ◽
Vol 18
◽
pp. 227-232
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1991 ◽
Vol 11
(1)
◽
pp. 15-39
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1994 ◽
Vol 33
(Part 1, No. 12B)
◽
pp. 7112-7116
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1993 ◽
Vol 8
(10)
◽
pp. 1889-1896
◽