Reliability analysis on low temperature gate stack process steps for 3D sequential integration

2017 ◽  
Author(s):  
A. Tsiara ◽  
X. Garros ◽  
C.-M. V. Lu ◽  
C. Fenouillet-Beranger ◽  
P. Batude ◽  
...  
Keyword(s):  
Low Temperature ◽  
Reliability Analysis ◽  
Gate Stack

Direct LaLuO3/Ge Gate Stack Formation by Interface Layer Scavenging and Subsequent Low Temperature O2 Annealing

2019 ◽  
Vol 33 (3) ◽  
pp. 375-382 ◽  
Author(s):  
Toshiyuki Tabata ◽  
Choong Hyun Lee ◽  
Koji Kita ◽  
Akira Toriumi
Keyword(s):  
Low Temperature ◽  
Interface Layer ◽  
Gate Stack

Ni/Au–Al2O3 gate stack prepared by low-temperature ALD and lift-off for MOS HEMTs

2013 ◽  
Vol 112 ◽  
pp. 204-207 ◽  
Author(s):  
Michal Blaho ◽  
Dagmar Gregušová ◽  
Michal Jurkovič ◽  
Štefan Haščík ◽  
Ján Fedor ◽  
...  
Keyword(s):  
Low Temperature ◽  
Gate Stack ◽  
Lift Off

Ultraviolet Nanosecond Laser Annealing for Low Temperature 3D-Sequential Integration Gate Stack

2019 ◽  
Vol 93 (1) ◽  
pp. 19-22
Author(s):  
Sébastien Kerdilès ◽  
Pablo Acosta-Alba ◽  
Anne-Sophie Royet ◽  
Jessica Lassarre ◽  
Cédric Perrot ◽  
...  
Keyword(s):  
Low Temperature ◽  
Laser Annealing ◽  
Nanosecond Laser ◽  
Gate Stack

Reliability Analysis of Ultra Low-Temperature Polycrystalline Silicon Thin-Film Transistors

2007 ◽  
Vol 46 (3B) ◽  
pp. 1303-1307 ◽  
Author(s):  
Hitoshi Ueno ◽  
Yuta Sugawara ◽  
Hiroshi Yano ◽  
Tomoaki Hatayama ◽  
Yukiharu Uraoka ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Reliability Analysis ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
Silicon Thin Film

scholarly journals Reliability analysis of solar energy and biogas boiler combination warming system

2021 ◽  
Vol 260 ◽  
pp. 01001
Author(s):  
Jinhui Zhao ◽  
Xuwei Han ◽  
Xuexiu Bai
Keyword(s):  
Low Temperature ◽  
Solar Energy ◽  
Reliability Analysis ◽  
Solar Collector ◽  
Biogas Production ◽  
Operation Conditions ◽  
Heating Capacity ◽  
Cold Area ◽  
Guarantee Rate

In order to solve the problem of low biogas production caused by low temperature in northern cold area, the solar energy and biogas boiler combination warming system is proposed to raise the temperature of biogas digester. In this paper, under the condition of the optimum area of solar collector, it's obtained that changeable rule of solar energy guarantee rate with month and rule of heating ratio of biogas boiler in the whole year. The solar energy guarantee rate of the system is more than 55.9%, and the combined heating capacity of solar energy and biogas boiler is enough to meet the requirements of annual operation conditions, which is reliable in the northern cold area.

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