Microfabrication And Characterisation Of Microelectrode Arrays For In Vivo Nerve Signal Recording

2005 ◽  
Author(s):  
E. Valderrama ◽  
P. Garrido ◽  
E. Cabruja ◽  
P. Heiduschka ◽  
A. Harsch ◽  
...  
Keyword(s):  
Microelectrode Arrays ◽  
Nerve Signal ◽  
Signal Recording

Characterization and optimization of microelectrode arrays for in vivo nerve signal recording and stimulation1Paper presented at WPB '96, Bangkok, May 1996.1

1997 ◽  
Vol 12 (9-10) ◽  
pp. 883-892 ◽  
Author(s):  
A. Blau ◽  
Ch. Ziegler ◽  
M. Heyer ◽  
F. Endres ◽  
G. Schwitzgebel ◽  
...  
Keyword(s):  
Microelectrode Arrays ◽  
Nerve Signal ◽  
Signal Recording

scholarly journals Wafer-Scale Fabrication and Assembly Method of Multichannel Microelectrode Arrays for ECoG Application

Electronics ◽  
2021 ◽  
Vol 10 (3) ◽  
pp. 316
Author(s):  
Cong Wang ◽  
Yu-Chen Wei ◽  
Ho-Kun Sung ◽  
Alok Kumar ◽  
Zhong-Liang Zhou ◽  
...  
Keyword(s):  
Printed Circuit Boards ◽  
Electrochemical Impedance ◽  
Microelectrode Arrays ◽  
Absence Seizure ◽  
Curing Conditions ◽  
Wafer Scale ◽  
In Vivo Test ◽  
Assembly Method ◽  
Signal Recording

High density electrocorticography (ECoG)-based microelectrode arrays (MEAs) are fabricated to timely record the neural activities to provide the fundamental understanding in neuroscience and biomedical engineering. This paper aims to introduce a device-based concept and wafer-scale fabrication process for MEAs. Flexible and biocompatible polyimide is applied on MEAs to bear all possible stress and strain. Detailed fabrication key techniques, including surface treatment, polyimide stability measurement, evaporation process, and curing conditions, have been discussed thoroughly. Moreover, the fabricated polyimide-based MEAs are surface-mounted on well-packaged printed circuit boards (PCBs) via a slot-type connector without any additional wire bonding to make the signal recording process easier. An absence seizure was recorded during the in vivo test, which shows the availability of signal recording based on the presented MEAs. The proposed MEAs could be remained at the skull, while the connector and PCBs can be disassembled apart. Therefore, the testing sample will get less suffering. To verify the robustness of the fabricated MEAs, the impedance properties were characterized using electrochemical impedance spectroscopy. The measured results indicate an average impedance of 12.3 ± 0.675 kΩ at 1 kHz. In total, 10 groups of MEAs were sample tested, and over 90% of the total 60 channels per 1-MEAs operated efficiently.

scholarly journals Electrodeposited platinum-iridium coating improves in vivo recording performance of chronically implanted microelectrode arrays

Biomaterials ◽  
2019 ◽  
Vol 205 ◽  
pp. 120-132 ◽  
Author(s):  
Isaac R. Cassar ◽  
Chunxiu Yu ◽  
Jaydeep Sambangi ◽  
Curtis D. Lee ◽  
John J. Whalen ◽  
...  
Keyword(s):  
Microelectrode Arrays

Silicon-based microelectrode arrays for stimulation and signal recording of in vitro cultured neurons

2011 ◽  
Vol 54 (10) ◽  
pp. 2199-2208 ◽  
Author(s):  
HaiXian Pan ◽  
XiaoYing Lü ◽  
ZhiGong Wang ◽  
TianLing Ren ◽  
Tao Fang ◽  
...  
Keyword(s):  
Microelectrode Arrays ◽  
Cultured Neurons ◽  
Silicon Based ◽  
Signal Recording

scholarly journals Ruthenium oxide based microelectrode arrays for in vitro and in vivo neural recording and stimulation

2020 ◽  
Vol 101 ◽  
pp. 565-574 ◽  
Author(s):  
Rahul Atmaramani ◽  
Bitan Chakraborty ◽  
Rashed T. Rihani ◽  
Joshua Usoro ◽  
Audrey Hammack ◽  
...  
Keyword(s):  
Microelectrode Arrays ◽  
Ruthenium Oxide ◽  
Neural Recording

scholarly journals Highly Stretchable, Compliant, Polymeric Microelectrode Arrays for In Vivo Electrophysiological Interfacing

2017 ◽  
Vol 29 (40) ◽  
pp. 1702800 ◽  
Author(s):  
Dianpeng Qi ◽  
Zhiyuan Liu ◽  
Yan Liu ◽  
Ying Jiang ◽  
Wan Ru Leow ◽  
...  
Keyword(s):  
Microelectrode Arrays ◽  
Highly Stretchable

Fabrication of the Silicon-Based Three-Dimension Neural Probe Arrays

2014 ◽  
Vol 609-610 ◽  
pp. 758-768 ◽  
Author(s):  
Yi Wei Zhuang ◽  
Zheng Xi Cheng ◽  
Xue Min Zhang ◽  
Hong Hui Yuan
Keyword(s):  
Flip Chip ◽  
Fabrication Process ◽  
Three Dimension ◽  
Sprague Dawley ◽  
Nerve Signal ◽  
Biological Compatibility ◽  
Neural Probe ◽  
Silicon Based ◽  
Probe Array

The neural probe array is an important tool for getting the neural signals. Giving consideration to the biological compatibility and the demand of integrating in circuit, new fabrication process of a silicon-based three-dimension neural probe array was reported. The idea about milling in mechanical process and the method of structure for transfer were introduced in the fabrication. The 10*10 scale silicon-based three-dimension probe arrays integrated in the readout circuit directly were fabricated by means of flip chip and multi-blade mixing dicing techniques. In the entire fabrication process, no any high-temperature process and silicon wet etching process, which would damage the circuit, were included. Using the fabrication process above, the 10*10 scale silicon-based probe arrays with centre-to-centre separation of 400 μm were achieved. In the probe arrays, whose good rate was more than 95%, the width of a single probe was 100 μm, the tip angle was 25o, and the height was more than 1.4 mm. Through the fabrication process, it was not only reducing the pin count greatly, but also simplifying the interface effectively. By the in vivo experiment of the Sprague Dawley rat, the corresponding nerve signal was obtained.

In vivo Neural Signal Recording using Double-sided Si Neural Probe

2009 ◽  
Author(s):  
S. Lee ◽  
R. Kobayashi ◽  
S. Kanno ◽  
K. Lee ◽  
T. Fukushima ◽  
...  
Keyword(s):  
Neural Signal ◽  
Neural Probe ◽  
Signal Recording ◽  
Neural Signal Recording

In-vivo Evaluation of Chronically Implanted Neural Microelectrode Arrays Modified with Poly (3,4-ethylenedioxythiophene) Nanotubes

2007 ◽  
Author(s):  
Mohammad Reza Abidian ◽  
Luis G. Salas ◽  
Azadeh Yazdan-Shahmorad ◽  
Timothy C. Marzullo ◽  
David C. Martin ◽  
...  
Keyword(s):  
Microelectrode Arrays ◽  
In Vivo Evaluation

scholarly journals Long-term in-vivo recording performance of flexible penetrating microelectrode arrays

2021 ◽  
Vol 18 (6) ◽  
pp. 066018
Author(s):  
Jae-Won Jang ◽  
Yoo Na Kang ◽  
Hee Won Seo ◽  
Boil Kim ◽  
Han Kyoung Choe ◽  
...  
Keyword(s):  
Signal To Noise Ratio ◽  
Microelectrode Arrays ◽  
High Signal ◽  
Robotic Arms ◽  
Single Neuron Recording ◽  
Tissue Reactions ◽  
Physical Degradation ◽  
Silicon Based

Abstract Objective. Neural interfaces are an essential tool to enable the human body to directly communicate with machines such as computers or prosthetic robotic arms. Since invasive electrodes can be located closer to target neurons, they have advantages such as precision in stimulation and high signal-to-noise ratio (SNR) in recording, while they often exhibit unstable performance in long-term in-vivo implantation because of the tissue damage caused by the electrodes insertion. In the present study, we investigated the electrical functionality of flexible penetrating microelectrode arrays (FPMAs) up to 3 months in in-vivo conditions. Approach. The in-vivo experiment was performed by implanting FPMAs in five rats. The in-vivo impedance as well as the action potential (AP) amplitude and SNR were analyzed over weeks. Additionally, APs were tracked over time to investigate the possibility of single neuron recording. Main results. It was observed that the FPMAs exhibited dramatic increases in impedance for the first 4 weeks after implantation, accompanied by decreases in AP amplitude. However, the increase/decrease in AP amplitude was always accompanied by the increase/decrease in background noise, resulting in quite consistently maintained SNRs. After 4 weeks of implantation, we observed two distinctive issues regarding long-term implantation, each caused by chronic tissue responses or by the delamination of insulation layer. The results demonstrate that the FPMAs successfully recorded neuronal signals up to 12 weeks, with very stably maintained SNRs, reduced by only 16.1% on average compared to the first recordings, although biological tissue reactions or physical degradation of the FPMA were present. Significance. The fabricated FPMAs successfully recorded intracortical signals for 3 months. The SNR was maintained up to 3 months and the chronic function of FPMA was comparable with other silicon based implantable electrodes.

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