A High-resolution Laser-based Deflection Measurement System For Characterizing Aluminum Electrostatic Actuators
2018 ◽
Vol 138
(9)
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pp. 480-481
2013 ◽
Vol 30
(10)
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pp. 2352-2366
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2018 ◽
Vol 15
(12)
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pp. 1937-1941
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Keyword(s):
1981 ◽
Vol 28
(3)
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pp. 3076-3077
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Keyword(s):
Keyword(s):
2012 ◽
Vol 61
(11)
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pp. 2924-2931
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