Modeling of failure mechanisms for optimized MEMS CAD: design, fabrication and characterization of in situ test benches

Author(s):  
O. Millet ◽  
V. Agache ◽  
B. Legrand ◽  
D. Collard ◽  
L. Buchaillot
2020 ◽  
Vol 48 ◽  
pp. 332-337 ◽  
Author(s):  
Zeyi Guan ◽  
Gongcheng Yao ◽  
Yuxin Zeng ◽  
Xiaochun Li

2020 ◽  
Vol 46 (3) ◽  
pp. 3132-3138 ◽  
Author(s):  
Wenying Zhou ◽  
Wen Yan ◽  
Nan Li ◽  
Yuanbing Li ◽  
Yajie Dai ◽  
...  

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