Young's modulus measurement method for nano-scale film materials by using MEMS resonator array

Author(s):  
D. Goto ◽  
T. Namazu ◽  
S. Inoue ◽  
T. Takeuchi ◽  
K. Murakami ◽  
...  
2017 ◽  
Vol 94 ◽  
pp. 248-252 ◽  
Author(s):  
Ali Lotfalian ◽  
Ali Jandaghian ◽  
Hossein Saghafifar ◽  
Ezzedin Mohajerani

1987 ◽  
Vol 55 (7) ◽  
pp. 664-665 ◽  
Author(s):  
J. Flores‐Maldonado ◽  
S. Galindo ◽  
H. Jiménez‐Domínguez

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