ScienceGate
Advanced Search
Author Search
Journal Finder
Blog
Sign in / Sign up
ScienceGate
Search
Author Search
Journal Finder
Blog
Sign in / Sign up
The calculation of quality factor of film bulk acoustic resonators with the consideration of viscosity
2009 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA 2009)
◽
10.1109/spawda.2009.5428886
◽
2009
◽
Author(s):
Ji Wang
◽
Jian-song Liu
◽
Jian-ke Du
◽
De-jin Huang
Keyword(s):
Quality Factor
◽
Acoustic Resonators
◽
Film Bulk Acoustic Resonators
◽
Film Bulk
Download Full-text
Related Documents
Cited By
References
Accurate Formula for Quality Factor Q of Thin Film Bulk Acoustic Resonators with Close Series and Parallel Resonance Frequencies
2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics
◽
10.1109/isaf.2007.4393393
◽
2007
◽
Cited By ~ 2
Author(s):
Pei-Yen Chen
◽
Yung-Chung Chin
◽
Chi-Yun Chen
◽
Chun-Li Hou
Keyword(s):
Thin Film
◽
Quality Factor
◽
Acoustic Resonators
◽
Resonance Frequencies
◽
Film Bulk Acoustic Resonators
◽
Film Bulk
◽
Parallel Resonance
◽
Quality Factor Q
Download Full-text
In-Liquid Quality Factor Improvement for Film Bulk Acoustic Resonators by Integration of Microfluidic Channels
IEEE Electron Device Letters
◽
10.1109/led.2009.2019973
◽
2009
◽
Vol 30
(6)
◽
pp. 647-649
◽
Cited By ~ 17
Author(s):
Wencheng Xu
◽
Xu Zhang
◽
Hongyu Yu
◽
A. Abbaspour-Tamijani
◽
Junseok Chae
Keyword(s):
Quality Factor
◽
Microfluidic Channels
◽
Acoustic Resonators
◽
Film Bulk Acoustic Resonators
◽
Film Bulk
Download Full-text
Editorial [Hot Topic: Sensing the World with Film Bulk Acoustic Resonators (Guest Editor: Xiaotun Qiu)]
Micro and Nanosystems
◽
10.2174/1876402911103020090
◽
2011
◽
Vol 3
(2)
◽
pp. 90-90
Author(s):
Xiaotun Qiu
Keyword(s):
Guest Editor
◽
Acoustic Resonators
◽
Film Bulk Acoustic Resonators
◽
The World
◽
Film Bulk
Download Full-text
Frequency Response of Thin-Film Bulk Acoustic Resonators to the Deposition of Tungsten, Platinum, Aluminium Oxide and Carbon Nanotube Thin-Films
Micro and Nanosystems
◽
10.2174/1876402911204020111
◽
2012
◽
Vol 4
(2)
◽
pp. 111-117
Author(s):
Martin Nirschl
◽
Daniel Sickert
◽
Ozlem Karaca
◽
Matthias Schreiter
◽
Janos Voros
Keyword(s):
Thin Film
◽
Thin Films
◽
Carbon Nanotube
◽
Frequency Response
◽
Aluminium Oxide
◽
Acoustic Resonators
◽
Film Bulk Acoustic Resonators
◽
Film Bulk
Download Full-text
Thin film piezoelectric property considerations for surface acoustic wave and thin film bulk acoustic resonators
Journal of the European Ceramic Society
◽
10.1016/s0955-2219(03)00147-x
◽
2003
◽
Vol 23
(14)
◽
pp. 2689-2692
◽
Cited By ~ 17
Author(s):
P.B Kirby
◽
M.D.G Potter
◽
C.P Williams
◽
M.Y Lim
Keyword(s):
Thin Film
◽
Acoustic Wave
◽
Piezoelectric Property
◽
Surface Acoustic Wave
◽
Acoustic Resonators
◽
Film Bulk Acoustic Resonators
◽
Film Bulk
Download Full-text
Development of an X-Band Filter Using Air-Gap-Type Film Bulk Acoustic Resonators
Japanese Journal of Applied Physics
◽
10.1143/jjap.47.4007
◽
2008
◽
Vol 47
(5)
◽
pp. 4007-4010
◽
Cited By ~ 36
Author(s):
Masanori Ueda
◽
Motoaki Hara
◽
Shinji Taniguchi
◽
Tsuyoshi Yokoyama
◽
Tokihiro Nishihara
◽
...
Keyword(s):
Air Gap
◽
Acoustic Resonators
◽
Band Filter
◽
X Band
◽
Film Bulk Acoustic Resonators
◽
Film Bulk
Download Full-text
An Accurate In-Fixture Measurement Method for AlN Film Bulk Acoustic Resonators
2012 Fourth International Symposium on Information Science and Engineering
◽
10.1109/isise.2012.46
◽
2012
◽
Author(s):
Hang Xu
◽
Yanjie Su
◽
Hanlin Yang
◽
Dong Xu
◽
Yafei Zhang
◽
...
Keyword(s):
Measurement Method
◽
Acoustic Resonators
◽
Aln Film
◽
Film Bulk Acoustic Resonators
◽
Film Bulk
Download Full-text
High coupling piezoelectric thin films of Pb(Zr,Ti)O3-based ternary perovskite compounds for GHz-range film bulk acoustic resonators
Applied Physics Letters
◽
10.1063/1.3126060
◽
2009
◽
Vol 94
(17)
◽
pp. 172903
◽
Cited By ~ 25
Author(s):
N. Yamauchi
◽
T. Shirai
◽
T. Yoshihara
◽
Y. Hayasaki
◽
T. Ueda
◽
...
Keyword(s):
Thin Films
◽
Acoustic Resonators
◽
Piezoelectric Thin Films
◽
Film Bulk Acoustic Resonators
◽
Film Bulk
Download Full-text
CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing
Sensors
◽
10.3390/s100504180
◽
2010
◽
Vol 10
(5)
◽
pp. 4180-4193
◽
Cited By ~ 51
Author(s):
Martin Nirschl
◽
Arto Rantala
◽
Kari Tukkiniemi
◽
Sanna Auer
◽
Ann-Charlotte Hellgren
◽
...
Keyword(s):
Label Free
◽
Acoustic Resonators
◽
Film Bulk Acoustic Resonators
◽
Film Bulk
Download Full-text
Super High-Frequency Scandium Aluminum Nitride Crystalline Film Bulk Acoustic Resonators
2019 IEEE International Ultrasonics Symposium (IUS)
◽
10.1109/ultsym.2019.8925598
◽
2019
◽
Cited By ~ 4
Author(s):
Mingyo Park
◽
Jialin Wang
◽
Rytis Dargis
◽
Andrew Clark
◽
Azadeh Ansari
Keyword(s):
Aluminum Nitride
◽
High Frequency
◽
Crystalline Film
◽
Acoustic Resonators
◽
Film Bulk Acoustic Resonators
◽
Film Bulk
◽
Super High Frequency
Download Full-text
Sign in / Sign up
Close
Export Citation Format
Close
Share Document
Close