Analysis of thickness-extensional modes in energy-trapped thin film resonators

2015 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) ◽

10.1109/spawda.2015.7364429 ◽

2015 ◽

Author(s):

Zi-nan Zhao ◽

Zheng-hua Qian ◽

Bing Wang ◽

Jia-shi Yang

Keyword(s):

Thin Film ◽

Thin Film Resonators

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Design and performance of UHF and L-band oscillators using thin-film resonators on semiconductor substrates

[1991] Proceedings of the 34th Midwest Symposium on Circuits and Systems ◽

10.1109/mwscas.1991.252038 ◽

2002 ◽

Author(s):

S.G. Burns ◽

R.J. Weber

Keyword(s):

Thin Film ◽

Semiconductor Substrates ◽

L Band ◽

And Performance ◽

Thin Film Resonators

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Numerical analysis of two dimensional thin film resonators

1993 IEEE International Frequency Control Symposium ◽

10.1109/freq.1993.367436 ◽

2002 ◽

Author(s):

K.M. Lakin

Keyword(s):

Thin Film ◽

Numerical Analysis ◽

Two Dimensional ◽

Thin Film Resonators

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4E-6 Electric Field Sensitivity of Thin Film Resonators Based on Piezoelectric AlN Thin Films

2006 IEEE Ultrasonics Symposium ◽

10.1109/ultsym.2006.125 ◽

2006 ◽

Author(s):

J. Enlund ◽

V. Yantchev ◽

I. Katardjiev

Keyword(s):

Thin Film ◽

Electric Field ◽

Field Sensitivity ◽

Thin Film Resonators

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Low‐Temperature Deposition of Highly Textured Aluminum Nitride by Direct Current Magnetron Sputtering for Applications in Thin‐Film Resonators

Journal of The Electrochemical Society ◽

10.1149/1.1391664 ◽

1999 ◽

Vol 146 (2) ◽

pp. 691-696 ◽

Author(s):

R. S. Naik ◽

R. Reif ◽

J. J. Lutsky ◽

C. G. Sodini

Keyword(s):

Thin Film ◽

Low Temperature ◽

Aluminum Nitride ◽

Magnetron Sputtering ◽

Direct Current ◽

Low Temperature Deposition ◽

Direct Current Magnetron Sputtering ◽

Temperature Deposition ◽

Thin Film Resonators

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Analysis of Piezoelectric Thin Film Resonators with Acoustic Quarter-Wave Multilayers

Japanese Journal of Applied Physics ◽

10.1143/jjap.39.3049 ◽

2000 ◽

Vol 39 (Part 1, No. 5B) ◽

pp. 3049-3053 ◽

Author(s):

Hirofumi Kanbara ◽

Hideaki Kobayashi ◽

Kiyoshi Nakamura

Keyword(s):

Thin Film ◽

Quarter Wave ◽

Piezoelectric Thin Film ◽

Thin Film Resonators

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Analysis of thickness-extensional waves propagating in the lateral direction of solidly mounted piezoelectric thin film resonators

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control ◽

10.1109/tuffc.2005.1428043 ◽

2005 ◽

Vol 52 (4) ◽

pp. 604-609 ◽

Author(s):

K. Nakamura ◽

S. Sato ◽

S. Ohta ◽

K. Yamada ◽

A. Doi

Keyword(s):

Thin Film ◽

Lateral Direction ◽

Piezoelectric Thin Film ◽

Thin Film Resonators

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Analysis of Thickness Vibrations of C-Axis Inclined Zig-Zag Multi-layered Zinc Oxide Thin Film Resonators

Ferroelectrics ◽

10.1080/00150193.2013.814251 ◽

2013 ◽

Vol 445 (1) ◽

pp. 96-106 ◽

Author(s):

Haifeng Zhang

Keyword(s):

Thin Film ◽

Oxide Thin Film ◽

Zinc Oxide Thin Film ◽

Thin Film Resonators

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Multi-frequency lithium niobate thin-film resonators

72nd Device Research Conference ◽

10.1109/drc.2014.6872277 ◽

2014 ◽

Author(s):

Sunil A. Bhave

Keyword(s):

Thin Film ◽

Lithium Niobate ◽

Thin Film Resonators

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Near-field microwave microscopy of thin film resonators

2001 IEEE MTT-S International Microwave Sympsoium Digest (Cat. No.01CH37157) ◽

10.1109/mwsym.2001.967353 ◽

2002 ◽

Author(s):

J.A. Herbsommer ◽

H. Safar ◽

P.L. Gammel ◽

B.P. Barber ◽

M. Zierdt

Keyword(s):

Thin Film ◽

Microwave Microscopy ◽

Thin Film Resonators

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A micromachined sensor array using thin film resonators

Proceedings of the 1995 IEEE International Frequency Control Symposium (49th Annual Symposium) ◽

10.1109/freq.1995.484099 ◽

2002 ◽

Author(s):

J. Xia ◽

S. Burns ◽

M. Porter ◽

T. Xue ◽

G. Liu ◽

...

Keyword(s):

Thin Film ◽

Sensor Array ◽

Thin Film Resonators

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