Optimization of Quartz SAW Resonator Structure with Groove Gratings

1982 ◽  
Vol 29 (6) ◽  
pp. 299-309 ◽  
Author(s):  
T. Uno ◽  
H. Jumonji
Keyword(s):  
Resonator Structure

Simulation of Cantilever Force Sensor based on Ring Resonator structure

2017 ◽  
Vol 6 (3) ◽  
pp. 25
Author(s):  
Sanghvi Anjali S. ◽  
Sahu Vikas ◽  
Shrivastava Sharad Mohan ◽  
◽  
◽  
...  
Keyword(s):  
Ring Resonator ◽  
Force Sensor ◽  
Resonator Structure

Compact Ultra-Thin Seven-Band Microwave Metamaterial Absorber Based on a Single Resonator Structure

2019 ◽  
Vol 48 (6) ◽  
pp. 3939-3946 ◽  
Author(s):  
Yongzhi Cheng ◽  
Yao Zou ◽  
Hui Luo ◽  
Fu Chen ◽  
Xuesong Mao
Keyword(s):  
Metamaterial Absorber ◽  
Resonator Structure

Research for the Resonator Structure Process Technology of Resonant Pressure Sensors

2014 ◽  
Vol 609-610 ◽  
pp. 1020-1022
Author(s):  
Zheng Yuan Zhang ◽  
Yang Cao ◽  
Yong Mei ◽  
Jian Gen Li ◽  
Zhi Cheng Feng
Keyword(s):  
Surface Roughness ◽  
High Precision ◽  
Silicon Substrate ◽  
Pressure Sensors ◽  
Structure Design ◽  
Process Technology ◽  
Design And Optimization ◽  
Resonator Structure ◽  
Etch Stop ◽  
Koh Etching

The fabrication of butterfly-shape resonator is key for high precision resonator, for requiring suspend on the silicon substrate. This paper is focused on the technology of making butterfly-shape resonator. the variety of structure design can be used to make butterfly-shape resonator have been analyzed, the structure of butterfly-shape resonator is obtained, and for reducing the etch surface roughness, KOH etching conditions, such as composition, concentration, and temperature of etch solution, have been done. Combining with above testing results, the structure design and optimization KOH etching technology are obtained ,based on the technology, using the boron etch stop technique , the silicon butterfly-shape resonator has been done, it can be used effectively in the fabrication of the silicon resonant sensor.

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