Junction-Level Thermal Analysis of 3-D Integrated Circuits Using High Definition Power Blurring

Author(s):  
Samson Melamed ◽  
Thorlindur Thorolfsson ◽  
T. Robert Harris ◽  
Shivam Priyadarshi ◽  
Paul Franzon ◽  
...  
Author(s):  
Je-Hyoung Park ◽  
Ali Shakouri ◽  
Sung-Mo Kang

CMOS VLSI technology has been facing various technical challenges as the feature sizes scale down. To overcome the challenges imposed by the shrink of the conventional on-chip interconnect system in IC chips, alternative interconnect technologies are being developed: one of them is three dimensional chips (3D ICs). Even though 3D IC technology is a promising solution for interconnect bottlenecks, thermal issues can be exacerbated. Thermal-aware design and optimization will be more critical in 3D IC technology than conventional planar IC technology, and hence accurate temperature profiles of each active layer will become very important. In 3D ICs, temperature profile of one layer depends not only on its own power dissipation but also on the heat transferred from other layers. Thus, thermal considerations for 3D ICs need to be done in a holistic manner even if each layer can be designed and fabricated individually. Conventional grid-based temperature computation methods are accurate but are computationally expensive, especially for 3D ICs. To increase computational efficiency, we developed a matrix convolution technique, called Power Blurring (PB) for 3D ICs. The temperature resulting from any arbitrary power dissipation in each layer of the 3D chip can be computed quickly. The PB method has been validated against commercial FEA software, ANSYS. Our method yields good results with maximum error less than 2% for various case studies and reduces the computation time by a factor of ∼ 60. The additional advantage is the possibility to evaluate different power dissipation profiles without the need to re-mesh the whole 3D chip structure.


Author(s):  
Xue-Xin Liu ◽  
Kuangya Zhai ◽  
Zao Liu ◽  
Kai He ◽  
Sheldon X.-D Tan ◽  
...  

2001 ◽  
Vol 55 (3) ◽  
pp. 257-266 ◽  
Author(s):  
Michael D. Schaeberle ◽  
David D. Tuschel ◽  
Patrick J. Treado

Silicon integrated circuits are fabricated by the creation of complex layered structures. The complexity of these structures provides many opportunities for impurities, improperly annealed dopants, and stress effects to cause device contamination and failure. Nondestructive metrology techniques that rapidly and noninvasively screen for defects and relate silicon device structure to device performance are of value. We describe the first use of a liquid crystal tunable filter (LCTF) Raman chemical imaging microscope to assess the crystallinity of silicon semiconductor integrated circuits in a rapid and nondestructive manner without the need for sample preparation. The instrument has demonstrated lateral spatial resolving power of better than 250 nm and is equipped with a tunable imaging spectrometer having a spectral bandpass of 7.6 cm−1. The instrument rapidly produces high-definition Raman images where each image pixel contains a high-quality Raman spectrum. When combined with powerful processing strategies, the Raman chemical imaging system has demonstrated spectral resolving power of 0.03 cm−1 in a test silicon semiconductor wafer fabricated by using ion implantation. In addition, we have applied Raman chemical imaging for volumetric Raman imaging by analyzing the surface distribution of polycrystalline thin film structures. The approaches described here for the first time are generally applicable to the nondestructive metrology of silicon and compound semiconductor devices.


Author(s):  
Z. Hassan ◽  
N. Allec ◽  
Li Shang ◽  
R.P. Dick ◽  
V. Venkatraman ◽  
...  

1988 ◽  
Vol 35 (9) ◽  
pp. 1553-1556 ◽  
Author(s):  
G. Krieger ◽  
P.D. Einziger

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