A Review of Low Temperature Process Modules Leading Up to the First (≤500 °C) Planar FDSOI CMOS Devices for 3-D Sequential Integration

2021 ◽  
Vol 68 (7) ◽  
pp. 3142-3148
Author(s):  
C. Fenouillet-Beranger ◽  
L. Brunet ◽  
P. Batude ◽  
L. Brevard ◽  
X. Garros ◽  
...  
2016 ◽  
Vol 213 (9) ◽  
pp. 2446-2451 ◽  
Author(s):  
Klemens Ilse ◽  
Thomas Schneider ◽  
Johannes Ziegler ◽  
Alexander Sprafke ◽  
Ralf B. Wehrspohn

2008 ◽  
Vol 22 (6) ◽  
pp. 1114-1121 ◽  
Author(s):  
Mouhamadou Bassir Diop ◽  
Michael W. Grutzeck

1993 ◽  
Vol 63 (14) ◽  
pp. 1963-1965 ◽  
Author(s):  
Hidefumi Mori ◽  
Masami Tachikawa ◽  
Mitsuru Sugo ◽  
Yoshio Itoh

2017 ◽  
Vol 23 (1) ◽  
pp. 87
Author(s):  
Alexander A. Shmatov ◽  
Ľubomír Šooš ◽  
Zdenko Krajný

<p class="AMSmaintext"><span lang="EN-US">The new method for hardening ready-made steels, hard alloys and diamond tools is developed: low-temperature process for producing thin-film solid lubricant coatings by hydro chemical treatment in specially prepared aqueous media of nanosized hard refractory compounds and subsequent tempering. The main advantages of the method over known processes are presented. The principles for dispersion of refractory materials are formulated. The structure and properties of the obtained coatings are examined. <br /></span></p>


2014 ◽  
Author(s):  
Salavat Z. Imaev ◽  
Lev A. Bagirov ◽  
Vasily E. Borisov ◽  
Evgeny V. Voytenkov

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