Flexure-Based Magnetically Levitated Dual-Stage System for High-Bandwidth Positioning

2019 ◽  
Vol 15 (8) ◽  
pp. 4665-4675 ◽  
Author(s):  
Haiyue Zhu ◽  
Tat Joo Teo ◽  
Chee Khiang Pang
Keyword(s):  
High Bandwidth ◽  
Dual Stage ◽  
Stage System ◽  
Magnetically Levitated

GAP CONTROL OF ELECTRICAL DISCHARGE GRINDING WITH HIGH BANDWIDTH DUAL STAGE ACTUATORS

2015 ◽  
Vol 75 (11) ◽  
Author(s):  
Bo Hu ◽  
M. Zulafif Rahim ◽  
Songlin Ding ◽  
Milan Brandt ◽  
Christopher Lim ◽  
...  
Keyword(s):  
Piezoelectric Actuator ◽  
Electrical Discharge ◽  
Electrical Discharge Machine ◽  
Travel Distance ◽  
Feedback Signal ◽  
Linear Actuator ◽  
High Bandwidth ◽  
Dual Stage ◽  
Stage System ◽  
Gap Width

Electrical discharge grinding process has four types of discharge states and abnormal states, such as arcs and short circuits have great impact on the machining efficiency and the surface finish of workpieces, for example, polycrystalline diamond cutting tools. The aim of this study had been to develop a new servo system with high bandwidth dual stage actuators, which can quickly change the gap width to eliminate these harmful discharge states. The structure of the dual stage system is that a piezoelectric actuator stands on a linear actuator and both move along one axis. The piezoelectric actuator, which has high bandwidth but short travel distance, was used for the gap width control and the linear actuator, which is relatively slow but has long travel distance, tunes the feed rate of the workpiece to match the erosion rate. The gap information obtained from the electrical discharge waveform was used as a feedback signal. The linear actuator system adjusted its velocity based on the average piezoelectric displacement value. Hence, an electrical discharge machine was developed with a one-axis dual stage system. The results from simulations and experiments showed that the new system provided a high bandwidth response, as well as enhanced the machining rate and stability.  

scholarly journals Online-Offline Optimized Motion Profile for High-Dynamic Positioning of Ultraprecision Dual Stage

Complexity ◽  
2018 ◽  
Vol 2018 ◽  
pp. 1-13 ◽  
Author(s):  
Yang Liu ◽  
Yue Dong ◽  
Jiubin Tan
Keyword(s):  
Model Identification ◽  
Direct Drive ◽  
Motion Platform ◽  
Residual Vibration ◽  
Dual Stage ◽  
Stage System ◽  
Curve Profile ◽  
High Dynamic ◽  
S Curve ◽  
Motion Profile

The wafer stage in dual-stage lithographic system is an air-bearing servo motion platform requiring high positioning accuracy and high transient performance. However, the residual vibration, resulting from almost zero damping, high velocity, parallel decoupling structure, and direct drive, brings about unacceptable overshoot and settling time. To suppress these unfavorable elements in high dynamic motion, a novel motion profile planning method combined with input shaping is proposed in this paper. Firstly, a trajectory named all free S-curve (AFS-curve) is derived, which has less constraints and better performance than traditional S-curve profile. Then, AFS-curve combined with a zero vibration shaper (ZV) is developed to further suppress residual vibration. Due to the very complex parameter adjustment, the online tuning may cause system oscillation that leads to damage of the precision stage. This paper, furthermore, proposes an online-offline method to optimize the parameters in the motion profile. Online step is performed to collect input and output data. Offline step includes the system model identification based on I/O data and parameter self-learning based on particle swarm optimization (PSO). The simulation and experimental results indicate that the proposed method achieves significant reduction of the positioning time and the overshoot in the dual-stage system.

Sequential vs. Parallel Synthesis for Dual-Stage Hard Disk Drives

2012 ◽  
Author(s):  
Craig E. Stensland ◽  
Mark Bedillion
Keyword(s):  
Controller Design ◽  
Hard Disk Drives ◽  
Voice Coil Motor ◽  
Hard Disk ◽  
Parallel Synthesis ◽  
Disk Drives ◽  
Parallel Design ◽  
High Bandwidth ◽  
Dual Stage ◽  
Single Input

Modern hard disk drives (HDDs) use single-input, dual-output (SIDO) controllers to control a dual-stage plant consisting of a large-stroke voice coil motor (VCM) and a short-stroke, high-bandwidth piezoelectric microactuator (PZT). Various methods have been proposed to perform the SIDO controller design; among the most commonly used approaches is μ-synthesis. While μ-synthesis generates stable controllers for the overall system, it does not guarantee stability of the VCM-only loop in the presence of microactuator saturation or failure. One approach to the DISO design that maintains VCM-only stability is the sequential design of VCM and PZT controllers. This paper presents a systematic study of sequential vs. parallel design. Designs are evaluated by comparing values of μ obtained for equivalent designs between the sequential and parallel approaches. The circle criterion is used to test stability of the system under saturation. Performance of sequential and parallel designs in shock events are tested in simulation.

scholarly journals Design of a dual stage actuator tape head with high-bandwidth track following capability

2009 ◽  
Vol 15 (10-11) ◽  
pp. 1525-1529 ◽  
Author(s):  
Bart Raeymaekers ◽  
Matthew R. Graham ◽  
Raymond A. de Callafon ◽  
Frank E. Talke
Keyword(s):  
High Bandwidth ◽  
Dual Stage ◽  
Dual Stage Actuator

The performance advantages of a dual-stage system

2004 ◽  
Author(s):  
Marc Boonman ◽  
Coen v. d. Vin ◽  
Sjef Tempelaars ◽  
Ronald v. Doorn ◽  
John Zimmerman ◽  
...  
Keyword(s):  
Dual Stage ◽  
Stage System

High Precision Hybyid Technology Using Dual-Stage of Linear Motor and Piezo-Actuator for Milling Machine

2007 ◽  
Author(s):  
B. M. Chung ◽  
I. J. Yeo ◽  
T. J. Ko ◽  
J. K. Park
Keyword(s):  
High Precision ◽  
High Speed ◽  
Piezo Actuator ◽  
Precision Positioning ◽  
Positional Accuracy ◽  
Linear Motors ◽  
Machining System ◽  
Dual Stage ◽  
Stage System ◽  
Long Stroke

High precision machining technology has become one of the important parts in the development of a precision machine. Such a machine requires high speed on a large workspace as well as high precision positioning. For machining systems having a long stroke with ultra precision, a dual-stage system including a global stage (coarse stage) and a micro stage (fine stage) is designed in this paper. Though linear motors have a long stroke and high precision feed drivers, they have some limitations for submicron positioning. Piezo-actuators with high precision also have severe disadvantage for the travel range, and the stroke is limited to a few microns. In the milling experiments, the positional accuracy has been readily achieved within 0.2 micron over the typical 20 mm stroke, and the path error over 2 micron was reduced within 0.2 micron. Therefore, this technique can be applied to develop high precision positioning and machining in the micro manufacturing and machining system.

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