High Throughput 16 NM Nanogap by Variable Shaped Beam Method Using F7000S-VD02 EB Lithography

Author(s):  
Akio Higo ◽  
Yukinori Ochiai ◽  
Yoshio Mita
2010 ◽  
Author(s):  
Matthias Slodowski ◽  
Hans-Joachim Döring ◽  
Ines A. Stolberg ◽  
Wolfgang Dorl

Author(s):  
L. H. Veneklasen ◽  
H. M. Kao ◽  
S. A. Rishton ◽  
S. Winter ◽  
V. Boegli ◽  
...  

Author(s):  
Vladimir Yu. Kolosov ◽  
Anders R. Thölén

In this paper we give a short overview of two TEM applications utilizing the extinction bend contour technique (BC) giving the advantages and disadvantages; especially we consider two areas in which the BC technique remains unique. Special attention is given to an approach including computer simulations of TEM micrographs.BC patterns are often observed in TEM studies but are rarely exploited in a serious way. However, this type of diffraction contrast was one of the first to be used for analysis of imperfections in crystalline foils, but since then only some groups have utilized the BC technique. The most extensive studies were performed by Steeds, Eades and colleagues. They were the first to demonstrate the unique possibilities of the BC method and named it real space crystallography, which developed later into the somewhat similar but more powerful convergent beam method. Maybe, due to the difficulties in analysis, BCs have seldom been used in TEM, and then mainly to visualize different imperfections and transformations.


2007 ◽  
Vol 177 (4S) ◽  
pp. 52-53
Author(s):  
Stefano Ongarello ◽  
Eberhard Steiner ◽  
Regina Achleitner ◽  
Isabel Feuerstein ◽  
Birgit Stenzel ◽  
...  

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