This paper presents single- and dual-end-effector configurations of a planar three-degree of freedom parallel robot arm designed for automated pick-place operations in vacuum cluster tools for semiconductor and flat-panel-display manufacturing applications. The basic single end-effector configuration of the arm consists of a pivoting base platform, two elbow platforms and a wrist platform, which are connected through two symmetric pairs of parallelogram mechanisms. The wrist platform carries an end-effector, the position and angular orientation of which can be controlled independently by three motors located at the base of the robot. The joints and links of the mechanism are arranged in a unique geometric configuration which provides a sufficient range of motion for typical vacuum cluster tools. The geometric properties of the mechanism are further optimized for a given motion path of the robot. In addition to the basic symmetric single end-effector configuration, an asymmetric costeffective version of the mechanism is derived, and two dual-end-effector alternatives for improved throughput performance are described. In contrast to prior attempts to control angular orientation of the end-effector(s) of the conventional arms employed currently in vacuum cluster tools, all of the motors that drive the arm can be located at the stationary base of the robot with no need for joint actuators carried by the arm or complicated belt arrangements running through the arm. As a result, the motors do not contribute to the mass and inertia properties of the moving parts of the arm, no power and signal wires through the arm are necessary, the reliability and maintenance aspects of operation are improved, and the level of undesirable particle generation is reduced. This is particularly beneficial for high-throughput applications in vacuum and particlesensitive environments.
Short-Term Scheduling Model of Cluster Tool in Wafer Fabrication
