Study for Temperature Coefficient of Frequency of Surface Acoustic Wave Devices with SiOxNy Film Using LiTa03 Substrate

Author(s):  
A. Nishimura ◽  
S. Matsuda ◽  
Y. Kabe ◽  
H. Nakamura
2011 ◽  
Vol 50 (7) ◽  
pp. 07HD13 ◽  
Author(s):  
Hidekazu Nakanishi ◽  
Hiroyuki Nakamura ◽  
Tetsuya Tsurunari ◽  
Joji Fujiwara ◽  
Yosuke Hamaoka ◽  
...  

2011 ◽  
Vol 50 (7S) ◽  
pp. 07HD13 ◽  
Author(s):  
Hidekazu Nakanishi ◽  
Hiroyuki Nakamura ◽  
Tetsuya Tsurunari ◽  
Joji Fujiwara ◽  
Yosuke Hamaoka ◽  
...  

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