Thin effective oxide thickness (∼0.5 nm) and low leakage current gate dielectric for Ge MOS devices by plasma nitrided Al2O3 intermediate layer
Keyword(s):
2018 ◽
Vol 65
(2)
◽
pp. 680-686
◽
Keyword(s):
2014 ◽
Vol 35
(1)
◽
pp. 138-140
◽
2014 ◽
Vol 211
(4)
◽
pp. 775-778
◽
2013 ◽
Vol 34
(6)
◽
pp. 738-740
◽
Keyword(s):
2012 ◽
Vol 463-464
◽
pp. 1341-1345
◽
Keyword(s):