Novel Bulk Acoustic Wave Hammer to Determinate the Dynamic Response of Microstructures Using Pulsed Broad Bandwidth Ultrasonic Transducers

Author(s):  
Wen-Pin Lai ◽  
Yi-Ping Ho ◽  
Weileun Fang

Abstract A novel testing technique to determinate the dynamic response of the microstructure is presented. In this study, a bulk acoustic wave hammer generated by a pulsed ultrasonic transducer is used to excite the microstructures. Thus the dynamic response of the microstructure in a wide frequency range is excited. Based on this novel method and test apparatus, the dynamic response of the microstructure including the resonant frequency, mode shape and the modal damping of the microstructure can be measured in a single excitation. Experimental results of the microbeams with different length agree well with theoretical predictions. In summary, the proposed BAW hammer technique has the following advantages. The sample preparation for this approach is very easy since it is not necessary to deposit an additional film for thermal or electrical purpose. In this regard, the experimental results of this technique are more accurate since there is no additional film to influence the dynamic behavior of the test sample. Moreover, there is no uncertain side effect such as thermal and acoustic coupling, caused by this approach. Since the test apparatus is also very simple, this approach has the potential to do the on-line test for batch production.

Author(s):  
Wen Pin Lai ◽  
Weileun Fang

A novel excitation device using pulsed 1–3 composite ultrasonic transducer is presented. This composite transducer generates a bulk acoustic wave (BAW) to impact the microstructures like a hammer. Thus, a broad bandwidth and constant power spectrum for the vibration test of microstructures are available. The characteristics of a BAW hammer produced with the 1–3 composite transducer were simulated by commercial software PIEZOCAD. According to the proposed wafer level fabrication process of the 1–3 composite BAW hammer, it is possible to design the 1–3 composite BAW hammer to generate an impulse with a specific waveform. Thus the natural behavior of the microstructure within a specific frequency range can be determined. The experimental results of a BAW hammer with composite structure agree well with the simulation predictions. Moreover, the dynamic response of microstructures including the resonant frequency, mode shape and the modal damping can be measured in a single impulse excitation. Since the measurement apparatus is readily to be built, this approach has the potential to do the on-line test for batch production.


2015 ◽  
Vol 23 (17) ◽  
pp. 2782-2794 ◽  
Author(s):  
M Portentoso ◽  
P Pennacchi ◽  
S Chatterton

In this paper, a comparison between two different machine tool columns is presented. The two columns are realized with a different technology: classic metalworking versus metal foam sandwiches. The aim of the experimental tests is the evaluation of their different mechanical performances and characteristics, with a particular focus on the dynamic response and on the convenience to consider system damping as a key parameter. This kind of comparison is generally believed as difficult, because the foam-filled structures usually show not-linear behavior, which makes not applicable the usual experimental modal procedures. The comparison is carried out in terms of both modal analysis and wide frequency range excitation, as described in the paper. A new method is introduced by the authors to deem which technology is the more suitable, based on overall dynamic response in a wide range of frequency, rather than on modal damping.


Author(s):  
Rafael Perea-Robles ◽  
Jordi Mateu ◽  
Carlos Collado ◽  
Yazid Yusuf ◽  
Alfred Gimenez ◽  
...  

Abstract The novel acoustic transversal topology has demonstrated to be a potential candidate for the development of the next generation of communication filters. The major asset of this topology is its capacity to achieve any filter response without the detriment of limited electro-acoustic coupling. Additionally, this topology prompts for an easy connection of different filters to create multiband and multiplexing responses. This study recalls and further details on the design of multiplexers based on transversal topology using bulk acoustic wave (BAW) or surface acoustic wave (SAW) resonators. An important practical aspect of this topology is the need of a BALUN stage at one port of the filter. The use of the transversal topology is then applied to another type of acoustic resonator configuration, coupled resonator filter (CRF). Such a resonator configuration offers control over the phase of each transversal path, allowing us to eliminate the BALUN stage. CRF resonators are modeled by means of a different circuit model than BAW or SAW, which calls for a new synthesis procedure. This paper describes the synthesis approach and circuit transformation for the development of multiplexers based on the transversal arrangement of the CRF resonators. An example of a fully simulated 9-plexer is provided to verify this procedure.


Sign in / Sign up

Export Citation Format

Share Document