The Adaptive Piezoelectric Microsensoriactuator for Active Control of Microcantilevers
The adaptive piezoelectric sensoriactuator is modified for use at the microscale to facilitate non-contact mode imaging of a microcantilever MEMS device in atomic force microscopy. The sensoriactuator is a truly colocated (sensor and actuator occupy exactly the same position on the structure) sensor/actuator device that uses a hybrid digital and analog design to drive a structure while simultaneously sensing the mechanical response. Using a piezoelectric material to both sense and actuate simultaneously is problematic because of the difficulty in resolving the sensory (mechanical) and actuator (electrical) parts of the output signal. Implementation of the adaptive piezoelectric sensoriactuator at the microscale results in a system with electrical quantities that are vastly reduced or increased from typical macroscale values, requiring more precise components and more careful design and construction of analog circuitry. For example, a typical micro-cantilever piezoelectric has a capacitance of on the order of 100 pF with an impedance at 50 kHz nearly 32 kΩ. The signal levels are significantly smaller with a typical piezoelectric current on the order of 100 nA. Thus, environmental noise can overwhelm signals in the system mandating the use of high precision operational amplifiers featuring ultra-low bias currents (±30 fA) and careful guarding or shielding of all circuitry. As reported in this paper, the adaptive piezoelectric microsensoriactuator has been successfully used to simultaneously sense and actuate while imaging using non-contact mode. The self-sensing microcantilever was successfully tested to produce a surface image using the microsensoriactuator to measure the movement of the microcantilever. The RMS value of the microsensoriactuator output is compared with the desired RMS output and the difference is used to drive an active resonance response controller. The active resonance response controller determines the control signal required to augment or attenuate the microcantilever’s motion to match the desired motion.