Resonant Versus Sub-Resonant Operation of a MEMS Heat Engine

Author(s):  
H. Bardaweel ◽  
R. Richards ◽  
C. Richards ◽  
M. Anderson

The operation of a MEMS-based micro heat engine at resonant and sub-resonant conditions is presented. Both model and experiments are used to investigate resonant and sub-resonant operation of the engine. In this work, we look at the pressure-volume diagrams of an engine operated at resonance and sub-resonance. Model predictions of the PV diagram are in favorable agreement with measured data. The results show that resonant operation is beneficial. At resonance, the pressure and volume in the engine cavity are decoupled and more mechanical work is observed. The PV diagram describes an elliptical shape. However, for an off-resonant operation the pressure and volume become more coupled and less mechanical work is observed. The PV diagram is described by a sigmoidal shape.

Author(s):  
Mark D. Sensmeier ◽  
Kurt L. Nichol

Correlation between dynamic strain gage measurements and modal analysis results can be adversely affected by gage misplacement and gage misorientation. An optimization algorithm has been developed which allows the modeled strain gage locations and orientations to be varied within specified tolerances. An objective function is defined based on the least squares sum of the differences between experimental and model results. The Kuhn-Tucker conditions are then applied to find the gage locations and orientations which minimize this objective function. The procedure is applied on a one-time basis considering all measured modes of vibration simultaneously. This procedure minimizes instrumentation error which then allows the analyst to modify the model to more accurately represent other factors, including boundary conditions. Flat plate vibratory data was used to demonstrate a significant improvement in correlation between measured data and model predictions.


1999 ◽  
Author(s):  
Richard B. Peterson

Abstract Richard P. Feynman introduced the field of microscale and nanoscale engineering in 1959 by giving a talk on how to make things very small. Feynman’s premise was that no fundamental physical laws limit the size of a machine down to the microscopic level. Is this true for all types of machines? Are micro thermal devices fundamentally different than mechanically-based machines with respect to their scaling laws? This paper demonstrates that micro thermal engines do indeed suffer serious performance degradation as their characteristic size is reduced. A micro thermal engine, and more generally, any thermally-based micro device, depends on establishing a temperature difference between two regions within a small structure. In this paper, the performance of a micro thermal engine is explored as a function of the characteristic length parameter, L. In the development, the important features of thermal engines are discussed in the context of developing simple scaling laws predicting the dependency of the operating efficiency on L. After this is accomplished, a general model is derived for a heat engine operating between two temperature reservoirs and having both intrinsic and extrinsic sources of irreversibility, i.e. thermal conductances and heat leakage paths for the heat flow. With this model and typical numerical values for the conductances, micro heat engine performance is predicted as the characteristic size is reduced. This paper demonstrates that under at least one particular formulation of the problem, there may indeed be some room at the bottom. However, heat transfer does play a critical role in determining micro engine performance and depending on how the heat transfer through the engine is modeled, vanishingly small efficiencies can result as the characteristic engine size goes to zero.


2006 ◽  
Vol 16 (9) ◽  
pp. S262-S269 ◽  
Author(s):  
L W Weiss ◽  
J H Cho ◽  
K E McNeil ◽  
C D Richards ◽  
D F Bahr ◽  
...  

Author(s):  
Scott A. Whalen ◽  
Michael R. Thompson ◽  
Cecilia D. Richards ◽  
David F. Bahr ◽  
Robert F. Richards

The development and low frequency testing of a micro heat engine is presented. Production of electrical power by a dynamic micro heat engine is demonstrated. The prototype micro heat engine is an external combustion engine in which thermal power is converted to mechanical power through a novel thermodynamic cycle. Mechanical power is converted into electrical power through the use of a thin-film piezoelectric membrane generator. This design is well suited to photolithography-based batch fabrication methods and is unlike any conventionally manufactured macro-scale engine. A peak-to-peak voltage of .84 volts, and power output of 1.5 microwatts have been realized at operating speeds of 10 Hz. Measurements are also presented for the engine operating at resonant conditions. Cycle speeds up to 240 Hz have been obtained, with peak-to-peak voltages of 70 millivolts.


Author(s):  
Yuelei Yang ◽  
Dan Zhang

This paper introduces a mathematical model which can be used to simulate the capillary pumping process of a micro heat engine. The micro heat engine has micron sized channels where the capillary pumping occurs. The classic Volume of Fluids (VOF) method is applied to obtain the velocity profiles of the fluids and to track the motions of the liquid-gas interfaces. The numerical results based this model have been compared with the experimental data and the initial retard of the pumping has been found and this phenomenon can be explained by the initial capillary pressure build-ups across the liquid-gas interfaces.


2002 ◽  
Vol 730 ◽  
Author(s):  
A.L. Olson ◽  
L.M. Eakins ◽  
B.W. Olson ◽  
D.F. Bahr ◽  
C.D. Richards ◽  
...  

AbstractThe P3 Micro Heat Engine relies on a thin film PZT based transducer to convert mechanical energy into usable electrical power. In an effort to increase process yield for these were used on sputtered Ti/Pt bottom electrodes to compare roughness, grain size, and diffusion for annealing temperatures between 550 and 700 °C. For an optimized bottom electrode, process yield for various sized top electrodes were then studied for PZT thickness between 0.54 and 1.62 for reducing stress concentrations. Two PZT etching geometries on 2.3 μm thick Si/SiO2 membranes, with 1.5-3.5 mm side-lengths, were examined and one was used to increase the strain at failure by at least 40%. Integrating improvements in process yield and strain at failure, single PZT based MEMS devices capable of generating power of up to 1 mW and in excess of 2 volts have been demonstrated operating at frequencies between 300 and 1,100 Hz.


2007 ◽  
Vol 17 (9) ◽  
pp. S217-S223 ◽  
Author(s):  
J H Cho ◽  
L W Weiss ◽  
C D Richards ◽  
D F Bahr ◽  
R F Richards

Author(s):  
C. Richards ◽  
R. Richards ◽  
H. Bardaweel ◽  
M. Anderson

A resonant heat engine in which the piston assembly is replaced by a sealed elastic cavity is modeled and analyzed. A linearized nondimensional lumped-parameter model is derived and used to investigate the factors that control the performance of the engine. The results show that operation at resonance is beneficial. Local maxima in efficiency are encountered at odd multiples of the resonance frequency. Efficiency is enhanced by small damping.


2003 ◽  
Vol 104 (3) ◽  
pp. 290-298 ◽  
Author(s):  
S Whalen ◽  
M Thompson ◽  
D Bahr ◽  
C Richards ◽  
R Richards

Abstract. This paper describes a new magnet-based method for applying a compressive pre-load to the piezoceramic elements of a Tonpilz-type acoustic projector, with the advantage of lower damping due to mechanical friction and a greater range of unhampered resonant motion since no plate spring is required. The Tonpilz-type acoustic projector can be applied to structural health monitoring studies involving air coupled ultrasound. Acoustic model predictions and the measured behaviour of a relaxor ferroelectric single crystal (RFSC) based prototype device, operating in air, are presented and show good correlation. With a 5 V drive, at 9420 Hz resonance, the prototype device generates a sound pressure level of 113 dB measured at an axial distance of 5 mm. The maximum peak tip displacement of the device’s head mass is predicted to be 0.7 µm at resonance. This is well within the 2 µm displacement produced by the 90 N magnetic pre-load, thus protecting the RFSC ceramic element from damaging tensile stress.


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