Power production by a dynamic micro heat engine with an integrated thermal switch

2007 ◽  
Vol 17 (9) ◽  
pp. S217-S223 ◽  
Author(s):  
J H Cho ◽  
L W Weiss ◽  
C D Richards ◽  
D F Bahr ◽  
R F Richards
2006 ◽  
Vol 16 (9) ◽  
pp. S262-S269 ◽  
Author(s):  
L W Weiss ◽  
J H Cho ◽  
K E McNeil ◽  
C D Richards ◽  
D F Bahr ◽  
...  

Author(s):  
L. W. Weiss ◽  
J. H. Cho ◽  
D. J. Morris ◽  
D. F. Bahr ◽  
C. D. Richards ◽  
...  

This work details the effect of top membrane compliance on the performance of a MEMS based micro-heat engine and integrated thermal switch at operating speeds of 20, 40, and 100Hz and heat inputs of up to 60mJ per cycle. The engine consists of two flexible membranes encapsulating a volume of saturated working fluid. A thermal switch is used to intermittently reject heat from the engine to a constant temperature cooling sink. Mechanical work output is measured based on the engine's top membrane deflection and internal operating pressure. Three top membranes are considered; a 2micron thick silicon membrane, a 300nm thick silicon-nitride membrane, and a 3micron thick corrugated silicon membrane. The engine is shown to produce 1.0mW of mechanical power when operated at 100Hz.


1999 ◽  
Author(s):  
Richard B. Peterson

Abstract Richard P. Feynman introduced the field of microscale and nanoscale engineering in 1959 by giving a talk on how to make things very small. Feynman’s premise was that no fundamental physical laws limit the size of a machine down to the microscopic level. Is this true for all types of machines? Are micro thermal devices fundamentally different than mechanically-based machines with respect to their scaling laws? This paper demonstrates that micro thermal engines do indeed suffer serious performance degradation as their characteristic size is reduced. A micro thermal engine, and more generally, any thermally-based micro device, depends on establishing a temperature difference between two regions within a small structure. In this paper, the performance of a micro thermal engine is explored as a function of the characteristic length parameter, L. In the development, the important features of thermal engines are discussed in the context of developing simple scaling laws predicting the dependency of the operating efficiency on L. After this is accomplished, a general model is derived for a heat engine operating between two temperature reservoirs and having both intrinsic and extrinsic sources of irreversibility, i.e. thermal conductances and heat leakage paths for the heat flow. With this model and typical numerical values for the conductances, micro heat engine performance is predicted as the characteristic size is reduced. This paper demonstrates that under at least one particular formulation of the problem, there may indeed be some room at the bottom. However, heat transfer does play a critical role in determining micro engine performance and depending on how the heat transfer through the engine is modeled, vanishingly small efficiencies can result as the characteristic engine size goes to zero.


Author(s):  
Scott A. Whalen ◽  
Michael R. Thompson ◽  
Cecilia D. Richards ◽  
David F. Bahr ◽  
Robert F. Richards

The development and low frequency testing of a micro heat engine is presented. Production of electrical power by a dynamic micro heat engine is demonstrated. The prototype micro heat engine is an external combustion engine in which thermal power is converted to mechanical power through a novel thermodynamic cycle. Mechanical power is converted into electrical power through the use of a thin-film piezoelectric membrane generator. This design is well suited to photolithography-based batch fabrication methods and is unlike any conventionally manufactured macro-scale engine. A peak-to-peak voltage of .84 volts, and power output of 1.5 microwatts have been realized at operating speeds of 10 Hz. Measurements are also presented for the engine operating at resonant conditions. Cycle speeds up to 240 Hz have been obtained, with peak-to-peak voltages of 70 millivolts.


Author(s):  
Yuelei Yang ◽  
Dan Zhang

This paper introduces a mathematical model which can be used to simulate the capillary pumping process of a micro heat engine. The micro heat engine has micron sized channels where the capillary pumping occurs. The classic Volume of Fluids (VOF) method is applied to obtain the velocity profiles of the fluids and to track the motions of the liquid-gas interfaces. The numerical results based this model have been compared with the experimental data and the initial retard of the pumping has been found and this phenomenon can be explained by the initial capillary pressure build-ups across the liquid-gas interfaces.


2002 ◽  
Vol 730 ◽  
Author(s):  
A.L. Olson ◽  
L.M. Eakins ◽  
B.W. Olson ◽  
D.F. Bahr ◽  
C.D. Richards ◽  
...  

AbstractThe P3 Micro Heat Engine relies on a thin film PZT based transducer to convert mechanical energy into usable electrical power. In an effort to increase process yield for these were used on sputtered Ti/Pt bottom electrodes to compare roughness, grain size, and diffusion for annealing temperatures between 550 and 700 °C. For an optimized bottom electrode, process yield for various sized top electrodes were then studied for PZT thickness between 0.54 and 1.62 for reducing stress concentrations. Two PZT etching geometries on 2.3 μm thick Si/SiO2 membranes, with 1.5-3.5 mm side-lengths, were examined and one was used to increase the strain at failure by at least 40%. Integrating improvements in process yield and strain at failure, single PZT based MEMS devices capable of generating power of up to 1 mW and in excess of 2 volts have been demonstrated operating at frequencies between 300 and 1,100 Hz.


2003 ◽  
Vol 104 (3) ◽  
pp. 290-298 ◽  
Author(s):  
S Whalen ◽  
M Thompson ◽  
D Bahr ◽  
C Richards ◽  
R Richards

Author(s):  
Travis M. Schubert ◽  
Shirin Jouzdani ◽  
Kevin P. Hallinan

Limiting solar power is the inability to cost effectively store energy. The most cost effective means to store solar energy is thermally in the ground, which can then be used for direct conversion to electricity. However, doing so is limited by a historically poor thermal efficiency of such engines. A novel Stirling engine is posed which more closely mimics a Carnot heat engine. It does this through the use of a new passive thermal ‘switch’ which permits heat flow into the expansion chamber of the Stirling engine only when the temperature of the chamber is above a desired value. Ideally heat would be added only at the end of the compression stroke and the beginning of the expansion stroke. Central to this thermal switch is the use of a vanadium dioxide (VO2) low mass heat exchanger internal to the expansion chamber. This low mass heat exchanger allows the film material to track and react to the temperature changes within the expansion chamber, permitting it to transfer heat only when needed. An adiabatic model of this enhanced solar Stirling engine is developed. Results indicate that the thermal efficiency can be nearly doubled, delivering a second law efficiency of over 0.6. Further, a year round overall efficiency accounting for losses in the Stirling engine and solar thermal collectors of 7% appears to be feasible when this engine is integrated with ground solar storage, providing the necessary power to meet loads in a low energy residence. Such results demonstrate promise for future application of this technology.


Author(s):  
S. A. Whalen ◽  
L. W. Weiss ◽  
C. D. Richards ◽  
D. F. Bahr ◽  
R. F. Richards

This work examines the conversion of thermal to mechanical energy in a micro heat engine by characterizing the heat engine’s working cycle. Results are given for dynamic measurements of pressure, volume, and temperature throughout the working cycle of the engine. Engine pressure is determined from the deformation of the two membranes in contact with the working fluid. A Michelson interferometer is used to measure the center deflection and displacement profile of both of these membranes. Pressure is determined from the membrane deflection using experimental static pressure-deflection curves. Engine temperature is measured using electrical resistance thermometry, via a micro resistance thermometer fabricated on the surface of a silicon membrane exposed to the working fluid in the engine cavity.


Author(s):  
I. Demir ◽  
R. F. Richards ◽  
D. F. Bahr ◽  
C. D. Richards

The mechanical behavior of a micromachined PZT membrane for power applications is investigated. The membrane is a bulk-micromachined silicon membrane that supports a thin film of piezoelectric ceramic (PZT) sandwiched between platinum and gold electrodes. The membrane undergoes large periodic deflections to convert mechanical power to electrical power in a micro heat engine. An analysis using a variational approach is developed to find an approximate closed from solution based on energy minimization. Experiments were conducted to obtain material properties, residual stresses, and pressure deflection relationships. The modeled results compare well to the experimental results.


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