Flexoelectric Materials and Structures for M/NEMS

Author(s):  
Wenbin Huang ◽  
Kyungrim Kim ◽  
Shujun Zhang ◽  
Fuh-Gwo Yuan ◽  
Xiaoning Jiang

Recent research progress on flexoelectricity suggests that dramatic enhancement of effective piezoelectric properties desirable for advanced M/NEMS, in principle, is attainable through flexoelectric (FE) effect and scale effect. In this paper, the transverse flexoelectric coefficient μ12 of barium strontium titanate (BST) microcantilevers with thicknesses ranging from 1.4 mm down to 30 μm was measured at room temperature. It was found that μ12 remains to be constant (8.5 μC/m) for all fabricated microcantilevers. Effective piezoelectric coefficients of these microcantilevers were also calculated, indicating that significantly increased effective piezoelectric coefficients can be obtained from microcantilevers with thickness of microns and nanometers, which is promising for micro/nano electromechanical systems (M/NEMS).

1999 ◽  
Vol 603 ◽  
Author(s):  
A.T. Findikoglu ◽  
Q.X. Jia ◽  
C. Kwon ◽  
B.J. Gibbons ◽  
K.Ø. Rasmussen ◽  
...  

AbstractWe have used a coplanar waveguide structure to study broadband electrodynamic properties of single-crystal and thin-film strontium titanate (STO), and thin-film barium strontium titanate (BSTO). We have implemented low-frequency capacitance (100 Hz - 1 MHz), swept-frequency transmittance (45 MHz - 4 GHz), and time-domain transmittance (dc - several GHz) measurements to determine effective refractive index (or, dielectric constant), and dissipation factor (or, loss tangent) as a function of dc bias (up to 4×106 V/m) and temperature (20 - 300 K). The STO samples used superconducting electrodes and were designed to operate at cryogenic temperatures, whereas BSTO samples used normal conducting electrodes and exhibited optimal performance around room temperature. By using nearly identical electrode geometries for all devices, we were able to conduct a direct comparative study among them, and investigate not only single-crystal vs thin-film, but also cryogenic vs room-temperature applications.


2015 ◽  
Vol 220 ◽  
pp. 1241-1246 ◽  
Author(s):  
Cristian E. Simion ◽  
André Sackmann ◽  
Valentin S. Teodorescu ◽  
Cristina F. Ruşti ◽  
Adelina Stănoiu

2007 ◽  
Vol 52 (11) ◽  
pp. 1300-1304 ◽  
Author(s):  
Vas. M. Mukhortov ◽  
S. I. Masychev ◽  
Yu. I. Golovko ◽  
A. V. Chub ◽  
Vl. M. Mukhortov

Author(s):  
S. Karthikeyan ◽  
P. Thirunavukkarasu ◽  
S. Surendhiran ◽  
Y.A. Syed Khadar ◽  
A. Balamurugan ◽  
...  

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