Reduced Order Model of Two Coupled MEMS Parallel Cantilever Resonators Under DC and AC Voltage Near Natural Frequency

2012 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Kyle N. Taylor
Keyword(s):  
Frequency Response ◽  
Natural Frequency ◽  
Multiple Scales ◽  
Equations Of Motion ◽  
Reduced Order Model ◽  
Lagrange Equations ◽  
Order Model ◽  
Reduced Order ◽  
Dc Voltage ◽  
Ground Plate

This paper deals with a system of two coupled parallel identical MEMS cantilever resonators and a ground plate. Alternating Current (AC) and Direct Current (DC) voltages are applied between the first resonator and ground plate, and a DC voltage applied between the resonators. The AC voltage frequency is near natural frequency of the resonators. The electrostatic forces produced by voltages are nonlinear. System equations of motion are obtained using Lagrange equations, then nondimensionalized. The Method of Multiple Scales (MMS) is used to find the steady state frequency response. The Reduced Order Model (ROM) is used to validate MMS results. Matlab is used to find cantilever frequency response of the resonator tip. The DC voltage between resonators is showed to significantly influence the response of the first resonator.

Reduced Order Model of CNT Cantilever Resonators Under AC Voltage Near Half Natural Frequency

2013 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Le Luo
Keyword(s):  
Natural Frequency ◽  
Multiple Scales ◽  
Electrostatic Force ◽  
Reduced Order Model ◽  
Order Model ◽  
Damping Force ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Carbon Nano Tubes ◽  
Ground Plate

This paper deals with electrostatically actuated Carbon Nano-Tubes (CNT) cantilevers using Reduced Order Model method. The system consists of a CNT parallel to a ground plate. An alternating current (AC) voltage is considered between the two. The CNT undergoes an oscillatory motion due to the electrostatic force generated by the voltage. Another two forces act on the CNT, namely a damping force, and a van der Waals force due to gaps less than 50 nm. The Method of Multiple Scales (MMS) and the Reduced Order Model (ROM) method (using AUTO solver) are used to investigate the system under soft excitations and/or weak nonlinearities. The frequency response is found in the case of AC near half natural frequency.

Reduced Order Model of CNT Cantilever Resonators Under AC Voltage Near Half Natural Frequency

2012 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Le Luo
Keyword(s):  
Natural Frequency ◽  
Multiple Scales ◽  
Van Der Waals ◽  
Reduced Order Model ◽  
Order Model ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Carbon Nano Tubes ◽  
Ground Plate ◽  
Phase Behaviors

This paper deals with electrostatically actuated Carbon Nano-Tubes (CNT) cantilevers using Reduced Order Model method. There are three kinds of forces acting on the CNT cantilever: electrostatic, elastostatic, and van der Waals. The van der Waals forces are significant for values of 50 nm or lower of the gap between the CNT and the ground plate. As both forceselectrostatic and van der Waals are nonlinear, and the CNT electrostatic actuation is given by AC voltage, the CNT undergoes nonlinear parametric dynamics. The Method of Multiple Scales (MMS), Reduced Order Model (ROM) and AUTO are used to investigate the system under soft excitations and/or weak nonlinearities. The frequency-amplitude and frequency-phase behaviors are found in the case of resonance near half natural frequency.

Reduced Order Model of Electrostatically Actuated MEMS Resonators Resonance Near Half Natural Frequency

2012 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Israel Martinez ◽  
Martin W. Knecht
Keyword(s):  
Frequency Response ◽  
Natural Frequency ◽  
Multiple Scales ◽  
Method Of Multiple Scales ◽  
Reduced Order Model ◽  
Order Model ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Amplitude Frequency Response ◽  
Mems Resonators

This paper uses the Reduced Order Model (ROM) method to investigate the influence of nonlinearities from parametric electrostatic excitation due to soft AC voltage of frequency near half natural frequency of the MEMS cantilever resonator on its frequency response. Most of the analysis in literature investigates pull-in phenomenon, stability, amplitude–frequency relations, or finds time responses of such systems. In this work it is showed that the bifurcation points in the amplitude-frequency response occur at lower frequencies and amplitudes than predicted by the Method of Multiple Scales (MMS), a perturbation method. This result is extremely important for predicting pull-in phenomena. Also the ROM predicts pull-in instability for large initial amplitudes and AC frequencies less than half natural frequency of the resonator. MMS fails to predict this behavior. Increasing the damping and/or decreasing the voltage increases the frequency at which the system undergoes into a pull-in phenomenon.

Frequency Response of Parametric Resonance of Electrostatically Actuated Circular Plates Under Hard Excitations

2019 ◽  
Author(s):  
Julio Beatriz ◽  
Dumitru I. Caruntu
Keyword(s):  
Frequency Response ◽  
Parametric Resonance ◽  
Multiple Scales ◽  
Method Of Multiple Scales ◽  
Reduced Order Model ◽  
Circular Plates ◽  
Order Model ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Modes Of Vibration

Abstract In this paper, the Method of Multiple Scales, and the Reduced Order Model method of two modes of vibration are used to investigate the amplitude-frequency response of parametric resonance of electrostatically actuated circular plates under hard excitations. Results show that the Method of Multiple Scales is accurate for low voltages. However, it starts to separate from the Reduced Order Model results as the voltage values are larger. The Method of Multiple Scales is good for low amplitudes and weak non-linearities. Furthermore the Reduced Order Model running with AUTO 07p is validated and calibrated using the 2 Term ROM time responses.

Reduced Order Model for MEMS Cantilever Resonators Under Soft AC Voltage Near Natural Frequency

2012 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Israel Martinez
Keyword(s):  
Natural Frequency ◽  
Nonlinear Response ◽  
Multiple Scales ◽  
Method Of Multiple Scales ◽  
Electrostatic Force ◽  
Reduced Order Model ◽  
Order Model ◽  
Reduced Order ◽  
First Order ◽  
Electrostatically Actuated

The nonlinear response of an electrostatically actuated cantilever beam microresonator is investigated. The AC voltage is of frequency near resonator’s natural frequency. A first order fringe correction of the electrostatic force and viscous damping are included in the model. The dynamics of the resonator is investigated using the Reduced Order Model (ROM) method, based on Galerkin procedure. Steady-state motions are found. Numerical results for the uniform microresonator are compared with those obtained via the Method of Multiple Scales (MMS).

Reduced Order Model Analysis of Frequency Response of Alternating Current Near Half Natural Frequency Electrostatically Actuated MEMS Cantilevers

2012 ◽  
Vol 8 (3) ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Israel Martinez ◽  
Martin W. Knecht
Keyword(s):  
Natural Frequency ◽  
Microelectromechanical Systems ◽  
Multiple Scales ◽  
Alternating Current ◽  
Reduced Order Model ◽  
Order Model ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Mems Resonator ◽  
Fringe Effect

This paper uses the reduced order model (ROM) method to investigate the nonlinear-parametric dynamics of electrostatically actuated microelectromechanical systems (MEMS) cantilever resonators under soft alternating current (AC) voltage of frequency near half natural frequency. This voltage is between the resonator and a ground plate and provides the actuation for the resonator. Fringe effect and damping forces are included. The resonator is modeled as a Euler-Bernoulli cantilever. ROM convergence shows that the five terms model accurately predicts the steady states of the resonator for both small and large amplitudes and the pull-in phenomenon either when frequency is swept up or down. It is found that the MEMS resonator loses stability and undergoes a pull-in phenomenon (1) for amplitudes about 0.5 of the gap and a frequency less than half natural frequency, as the frequency is swept up, and (2) for amplitudes of about 0.87 of the gap and a frequency about half natural frequency, as the frequency is swept down. It also found that there are initial amplitudes and frequencies lower than half natural frequency for which pull-in can occur if the initial amplitude is large enough. Increasing the damping narrows the escape band until no pull-in phenomenon can occur, only large amplitudes of about 0.85 of the gap being reached. If the damping continues to increase the peak amplitude decreases and the resonator experiences a linear dynamics like behavior. Increasing the voltage enlarges the escape band by shifting the sweep up bifurcation frequency to lower values; the amplitudes of losing stability are not affected. Fringe effect affects significantly the behavior of the MEMS resonator. As the cantilever becomes narrower the fringe effect increases. This slightly enlarges the escape band and increases the sweep up bifurcation amplitude. The method of multiple scales (MMS) fails to accurately predict the behavior of the MEMS resonator for any amplitude greater than 0.45 of the gap. Yet, for amplitudes less than 0.45 of the gap MMS predictions match perfectly ROM predictions.

Reduced Order Model on DC Bias Effect on the Frequency Response of Electrostatically Actuated Biosensor Microplates

2016 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Christian Reyes
Keyword(s):  
Frequency Response ◽  
Electrostatic Force ◽  
Alternate Current ◽  
Reduced Order Model ◽  
Order Model ◽  
Bias Effect ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Ground Plate ◽  
Dc Bias

This paper investigates the frequency response of microplates under electrostatic actuation. The microplate is parallel to a fixed ground plate. The electrostatic force that actuates the system is given by both Alternate Current (AC) and Direct Current (DC) voltages. The AC frequency is set to be near half natural frequency of the structure. Damping influence is also investigated in this paper. The method of investigation is Reduced Order Model. The effects of various parameters on the response of the structure are reported.

Reduced Order Model of Parametric Resonance of Electrostatically Actuated CNT Cantilever Resonators

2013 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Le Luo
Keyword(s):  
Parametric Resonance ◽  
Multiple Scales ◽  
Van Der Waals ◽  
Reduced Order Model ◽  
Order Model ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Carbon Nano Tubes ◽  
Ground Plate ◽  
Phase Behaviors

This paper deals with electrostatically actuated Carbon Nano-Tubes (CNT) cantilevers using Reduced Order Model (ROM) method. Forces acting on the CNT cantilever are electrostatic, van der Waals, and damping. The van der Waals forces are significant for values of 50 nm or lower of the gap between the CNT and the ground plate. As both forces electrostatic and van der Waals are nonlinear, and the CNT electrostatic actuation is given by AC voltage, the CNT undergoes nonlinear parametric dynamics. The Method of Multiple Scales (MMS), and ROM are used to investigate the system under soft excitations and/or weak nonlinearities. The frequency-amplitude and frequency-phase behaviors are found in the case of parametric resonance.

Reduced Order Model of Electrostatically Actuated Carbon Nanotube Cantilever Biosensors for Primary Resonance

2013 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Le Luo
Keyword(s):  
Multiple Scales ◽  
Van Der Waals ◽  
Primary Resonance ◽  
Reduced Order Model ◽  
Mass Detection ◽  
Order Model ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Carbon Nano Tubes ◽  
Ground Plate

This paper investigates electrostatically actuated Carbon Nano-Tubes (CNT) cantilevers biosensors using the Reduced Order Model (ROM) method. Forces acting on the CNT are electrostatic, damping, and van der Waals. The electrostatic actuation is given by soft AC voltage. Van der Waals forces are significant for gaps between the CNT and a ground plate lower than 100 nm. Both forces electrostatic and van der Waals are nonlinear. CNT undergoes nonlinear parametric dynamics. ROM is used to investigate the system under soft excitations and/or weak nonlinearities. The frequency-amplitude response is found in the case of primary resonance and compared to the Method of Multiple Scales (MMS). The CNT biosensor is to be used for mass detection applications.

Reduced Order Model of Frequency Response of Superharmonic Resonance of Electrostatically Actuated MEMS Resonators

2015 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Christian Reyes
Keyword(s):  
Frequency Response ◽  
Electrostatic Force ◽  
Reduced Order Model ◽  
Order Model ◽  
Reduced Order ◽  
Superharmonic Resonance ◽  
Electrostatically Actuated ◽  
Mems Resonator ◽  
Mems Resonators ◽  
Ground Plate

This paper deals with superharmonic resonance of electrostatically actuated MEMS resonator sensors. The system consists of a MEMS cantilever on top of a parallel ground plate. An AC voltage of frequency near one fourth the natural frequency of the resonator provides the electrostatic force of actuation. The frequency response of the superharmonic resonance of the structure is investigated using two term Reduced Order Model (ROM) method.

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