Improvement of energy harvesting performance from flexible thin film-based energy harvesters is essential to accomplish future self-powered electronics and sensor systems. In particular, the integration of harvesting signals should be established as a single device configuration without complicated device connections or expensive methodologies. In this research, we study the dual-film structures of the flexible PZT film energy harvester experimentally and theoretically to propose an effective principle for integrating energy harvesting signals. Laser lift-off (LLO) processes are used for fabrication because this is known as the most efficient technology for flexible high-performance energy harvesters. We develop two different device structures using the multistep LLO: a stacked structure and a double-faced (bimorph) structure. Although both structures are well demonstrated without serious material degradation, the stacked structure is not efficient for energy harvesting due to the ineffectively applied strain to the piezoelectric film in bending. This phenomenon stems from differences in position of mechanical neutral planes, which is investigated by finite element analysis and calculation. Finally, effectively integrated performance is achieved by a bimorph dual-film-structured flexible energy harvester. Our study will foster the development of various structures in flexible energy harvesters towards self-powered sensor applications with high efficiency.
Self-powered Wireless Occupancy Detector based on Flexible Piezoelectric Film