scholarly journals Nonlinear Analysis of Pull-In Voltage of Twin Micro-Cantilever Beams

2017 ◽  
Author(s):  
M. Amin Changizi ◽  
Ion Stiharu
Keyword(s):  
Nonlinear Analysis ◽  
Cantilever Beams ◽  
Micro Cantilever

Generalized closed-form models for pull-in analysis of micro cantilever beams subjected to partial electrostatic load

2012 ◽  
Vol 185 ◽  
pp. 109-116 ◽  
Author(s):  
Cuong Do ◽  
Maryna Lishchynska ◽  
Kieran Delaney ◽  
Martin Hill
Keyword(s):  
Closed Form ◽  
Cantilever Beams ◽  
Micro Cantilever

scholarly journals MODELING OF MONOCRYSTALLINE MAGNESIUM MICROBEAM BENDING

2018 ◽  
Vol 15 ◽  
pp. 69-73
Author(s):  
Jiří Němeček ◽  
Jan Maňák ◽  
Jiří Němeček
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Three Dimensional ◽  
Deformation Energy ◽  
Displacement Curve ◽  
Fe Model ◽  
Cantilever Beams ◽  
Elastoplastic Behavior ◽  
Load Displacement ◽  
Micro Cantilever

This paper presents a numerical simulation of a micro-scale experiment on a magnesium alloy. Micro cantilever beams were fabricated using Focused Ion Beam technology in a single crystal of Mg. The cantilever beams have dimensions in the order of a few micrometers and a pentagonal cross section. Nanoindenter was used for cantilever beam bending and load-displacement curve was received. Cantilevers with two different crystallographic orientations were chosen for the experiment. Three dimensional numerical FE model with elastoplastic behavior respecting crystal anisotropy was used to fit experimental load displacement curves. Strengths and deformation energy were evaluated from the models for each cantilever.

3D surface profilometry for both static and dynamic nanoscale full field characterization of AFM micro cantilever beams

2005 ◽  
Author(s):  
Liang-Chia Chen ◽  
Kuang-Chao Fan ◽  
Chi-Duen Lin ◽  
Calvin C. Chang ◽  
Ching-Fen Kao ◽  
...  
Keyword(s):  
Cantilever Beams ◽  
Full Field ◽  
Surface Profilometry ◽  
3D Surface ◽  
Micro Cantilever

Effect of Dielectric-Layer on the Stress Field of Micro Cantilever Beams at the Onset of Pull-In Instability

2013 ◽  
Vol 30 (1) ◽  
pp. 49-56 ◽  
Author(s):  
E. Yazdanpanahi ◽  
A. Noghrehabadi ◽  
M. Ghalambaz
Keyword(s):  
Stress Distribution ◽  
Dielectric Layer ◽  
Adomian Decomposition Method ◽  
Bending Moment ◽  
Distributed Parameter ◽  
Cantilever Beams ◽  
Layer Parameter ◽  
Adomian Decomposition ◽  
Micro Cantilever ◽  
Good Agreement

ABSTRACTIn this paper, stress distribution of micro cantilever beams in the presence of a dielectric-layer is studied using an analytic method. The Modified Adomian Decomposition Method (MADM) is applied to obtain a semi-analytical solution for a distributed parameter model of the micro cantilever beam. The important parameters for designing and manufacturing micro-actuators such as shear force, bending moment and stress distribution along the cantilevers are computed for different values of the dielectric-layer parameter. The results of MADM are compared with the numerical results, and they found in good agreement. It is found that increase of the dielectric-layer parameter increases the dimensionless pull-in voltage, tip deflection, internal stress and bending moment of the micro cantilever actuators at the onset of pull-in instability.

Micro Cantilever Beam Theory for Transverse Dynamics Using a Continuum Mechanics Model

2011 ◽  
Vol 415-417 ◽  
pp. 760-763
Author(s):  
Cheng Li ◽  
Wei Guo Huang ◽  
Lin Quan Yao
Keyword(s):  
Scale Parameter ◽  
Beam Theory ◽  
Nonlocal Elasticity Theory ◽  
Small Scale ◽  
Beam Model ◽  
Cantilever Beams ◽  
Mechanics Model ◽  
Axial Tension ◽  
Vibrational Characteristics ◽  
Micro Cantilever

The vibrational characteristics of cantilever beams with initial axial tension were studied using a nonlocal continuum Euler-Bernoulli beam model. Small size effects are essential to nanotechnology and it can not be ignored in micro or nano scale. Nonlocal elasticity theory has been proved to work well in nanomechanics and it is considered into the governing equation which can be transformed into a fourth-order ordinary differential equation together with a dispersion relation. Boundary conditions are applied so as to determine the analytical solutions of vibrational mode shape and transverse deformation through a numerical method. Relations between natural frequency and the small scale parameter are obtained, including the fundamental and the second order frequencies. It is found that both the small scale parameter and dimensionless initial axial tension play remarkable roles in dynamic behaviors of micro cantilever beams and their effects are analyzed and discussed in detail.

scholarly journals Restoring Force Surface Analysis of Nonlinear Vibration Data From Micro-Cantilever Beams

2006 ◽  
Author(s):  
Matthew S. Allen ◽  
Hartono (Anton) Sumali ◽  
David S. Epp
Keyword(s):  
Functional Form ◽  
Piecewise Linear ◽  
Cantilever Beams ◽  
Restoring Force ◽  
Vibration Data ◽  
Surface Method ◽  
Highly Nonlinear ◽  
Nonlinear Dynamic Characteristics ◽  
Restoring Forces ◽  
Micro Cantilever

The responses of micro-cantilever beams, with lengths ranging from 100-1500 microns, have been found to exhibit nonlinear dynamic characteristics at very low vibration amplitudes and in near vacuum. This work seeks to find a functional form for the nonlinear forces acting on the beams in order to aide in identifying their cause. In this paper, the restoring force surface method is used to non-parametrically identify the nonlinear forces acting on a 200 micron long beam. The beam response to sinusoidal excitation contains as many as 19 significant harmonics within the measurement bandwidth. The nonlinear forces on the beam are found to be oscillatory and to depend on the beam velocity. A piecewise linear curve is fit to the response in order to more easily compare the restoring forces obtained at various amplitudes. The analysis illustrates the utility of the restoring force surface method on a system with complex and highly nonlinear forces.

Non-Contact Mechanical Testing and Characterization of Micro-Scale Structures

2006 ◽  
Author(s):  
Jian Chen ◽  
Ganesh Subramanian ◽  
Justin Ricci ◽  
Liang Ban ◽  
Cetin Cetinkaya
Keyword(s):  
Plane Motion ◽  
Cantilever Beams ◽  
Micro Scale ◽  
New Class ◽  
Sensor Platform ◽  
Out Of Plane ◽  
Modes Of Vibration ◽  
Scale Structures ◽  
Micro Cantilever

A non-contact testing and characterization method based on air-coupled acoustic excitation and interferometric displacement measurements of micro-scale MEMS structures at room conditions is introduced. In demonstrating its potential uses in testing and characterization, the present non-contact approach is applied to (i) micro-cantilever beams and (ii) rotational disk oscillators. Air-coupled multi-mode excitation of micromechanical cantilever-type oscillators under a pulsed acoustic field generated by an air-coupled transducer is demonstrated and reported. Also, the testing and characterization of a micro-scale rotational disk oscillator developed for a new class of sensor platform is demonstrated. The main design objective of the rotational disk oscillator class is to overcome the out-of-plane motion related sensitivity limitations of the cantilever-based sensors at high frequency operations. The dynamics of the rotational disk oscillators is more complex than micro-cantilever beams due to its in-plane motion in addition to its various out-of-plane modes of vibration. The fabrication of a rotational disk oscillator requires a suspended disk whose underside is visibly inaccessible due to a narrow micro-gap. In addition to the dynamic characterization of the cantilever beams and rotational disk oscillators, the current investigation demonstrates that the presented approach can address unique structural concerns such as the verification of a gap separation of the rotational oscillator from the underlying silicon substrate. Utilizing the proposed technique, the resonant frequencies of the oscillator structures are obtained and its potential uses in the testing and characterization of micro-scale structures are discussed. The major specific advantages of the introduced approach include that (i) its noncontact nature can eliminate testing problems associated with stiction and adhesion, and (ii) it allows direct mechanical characterization and testing of components and sub-components of a micro-scale devices.

A Complete Parametric Study of Pull-In Voltage by Nonlinear Differential Equation

2014 ◽  
Author(s):  
M. Amin Changizi ◽  
Ion Stiharu
Keyword(s):  
Differential Equation ◽  
Electric Field ◽  
Cantilever Beam ◽  
Parametric Study ◽  
Nonlinear Ordinary Differential Equation ◽  
Cantilever Beams ◽  
Time Step ◽  
Robust Adaptive ◽  
Linear Differential ◽  
Micro Cantilever

Micro-cantilever beams are interested structures in MEMS because of their fabrication is very easy and its versatility. The importance of micro-cantilevers beam in MEMS has driven various investigations like static and dynamic performances under different loading such as potential fields. In this research the non-linear differential equation which models dynamics of a micro-cantilever beams vibration subjected to electrostatic field has been studied. The model which has one degree of freedom is used to calculate the pull-in voltage. This model adopted based on different method of calculating stiffness of micro-cantilever beam. The nonlinear ordinary differential equation which used to model the dynamics of the cantilever subjected to electric field close to snap on is highly stiff. Investigation on solving of nonlinear stiff ordinary equation showed that only Lsode algorithm yield to correct solution to the problem. Lsode is equipped with a robust adaptive time step selection mechanism that enables solutions to very stiff problems, as the one under discussion. The best match in the resonant frequency for equivalent stiffness based on four different models was considered. The stiffness model suitable for the best match in deflection is proved to be different from the model that yields. Pull-in voltage under electric field was studied. Pull-in voltage has been investigated from the analytical and numerical perspective. A complete parametric study of structural damping effect on large deflection of micro-cantilever beam was studied was done numerically in this work. Different kind of impulse voltages were considered and effect of them on pulling voltage numerically was studied. A cumbersome mathematical method, Lie symmetry, was used to drive a closed from of time response to step voltage for undamped system and pull in voltage of such system was calculated. Finally, a closed form driven from the nonlinear ODE for calculating pulling voltage was presented.

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