Proximity effect correction using pattern shape modification and area density map for electron-beam projection lithography

2001 ◽  
Vol 19 (6) ◽  
pp. 2483 ◽  
Author(s):  
Morimi Osawa ◽  
Kimitoshi Takahashi ◽  
Masami Sato ◽  
Hiroshi Arimoto ◽  
Kozo Ogino ◽  
...  
Keyword(s):  
Electron Beam ◽  
Proximity Effect ◽  
Shape Modification ◽  
Area Density ◽  
Projection Lithography ◽  
Pattern Shape ◽  
Density Map ◽  
Beam Projection ◽  
Proximity Effect Correction

Proximity effect correction using pattern shape modification and area density map

2000 ◽  
Vol 18 (6) ◽  
pp. 3150 ◽  
Author(s):  
Kimitoshi Takahashi ◽  
Morimi Osawa ◽  
Masami Sato ◽  
Hiroshi Arimoto ◽  
Kozo Ogino ◽  
...  
Keyword(s):  
Proximity Effect ◽  
Shape Modification ◽  
Area Density ◽  
Pattern Shape ◽  
Density Map ◽  
Proximity Effect Correction

High-Speed Proximity Effect Correction System for Electron-Beam Projection Lithography by Cluster Processing

2003 ◽  
Vol 42 (Part 1, No. 6B) ◽  
pp. 3827-3832 ◽  
Author(s):  
Kozo Ogino ◽  
Hiromi Hoshino ◽  
Yasuhide Machida ◽  
Morimi Osawa ◽  
Hiroshi Arimoto ◽  
...  
Keyword(s):  
Electron Beam ◽  
Proximity Effect ◽  
High Speed ◽  
Projection Lithography ◽  
Beam Projection ◽  
Proximity Effect Correction ◽  
Correction System

Fast and Simplified Technique of Proximity Effect Correction for Ultra Large Scale Integrated Circuit Patterns in Electron-Beam Projection Lithography

2002 ◽  
Vol 41 (Part 1, No. 6B) ◽  
pp. 4167-4172 ◽  
Author(s):  
Kozo Ogino ◽  
Hiromi Hoshino ◽  
Yasuhide Machida ◽  
Morimi Osawa ◽  
Kimitoshi Takahashi ◽  
...  
Keyword(s):  
Electron Beam ◽  
Integrated Circuit ◽  
Proximity Effect ◽  
Large Scale ◽  
Projection Lithography ◽  
Beam Projection ◽  
Proximity Effect Correction
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