A fast and simplified technique of proximity effect correction for ULSI patterns in electron-beam projection lithography
Keyword(s):
2003 ◽
Vol 42
(Part 1, No. 6B)
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pp. 3827-3832
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Keyword(s):
Keyword(s):
Keyword(s):
2001 ◽
Vol 19
(6)
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pp. 2483
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2002 ◽
Vol 41
(Part 1, No. 6B)
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pp. 4167-4172
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2002 ◽
Vol 20
(6)
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pp. 2672
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Keyword(s):
2002 ◽
Vol 1
(2)
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pp. 136
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Keyword(s):
2017 ◽
Vol 35
(5)
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pp. 051603
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