Silicon carbide formation by methane plasma immersion ion implantation into silicon

2003 ◽  
Vol 21 (4) ◽  
pp. 1375 ◽  
Author(s):  
Zhenghua An ◽  
Ricky K. Y. Fu ◽  
Peng Chen ◽  
Weili Liu ◽  
Paul K. Chu ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Ion Implantation ◽  
Carbide Formation ◽  
Plasma Immersion Ion Implantation

Fabrication of silicon carbide thin films by plasma immersion ion implantation with self-ignited glow discharge

2004 ◽  
Vol 447-448 ◽  
pp. 153-157 ◽  
Author(s):  
Zhenghua An ◽  
Ricky K.Y. Fu ◽  
Peng Chen ◽  
Weili Liu ◽  
Paul K. Chu ◽  
...  
Keyword(s):  
Thin Films ◽  
Silicon Carbide ◽  
Glow Discharge ◽  
Ion Implantation ◽  
Plasma Immersion Ion Implantation

Silicon carbide and boron carbide thin films formed by plasma immersion ion implantation of hydrocarbon gases

2007 ◽  
Vol 201 (19-20) ◽  
pp. 8366-8369 ◽  
Author(s):  
W. Ensinger ◽  
G. Kraft ◽  
F. Sittner ◽  
K. Volz ◽  
K. Baba ◽  
...  
Keyword(s):  
Thin Films ◽  
Silicon Carbide ◽  
Ion Implantation ◽  
Boron Carbide ◽  
Hydrocarbon Gases ◽  
Plasma Immersion Ion Implantation

Composition and Structure of SiCx:H Films Formed by Plasma Immersion ION Implantation From A Methane Plasma

2000 ◽  
Vol 609 ◽  
Author(s):  
K. Volz ◽  
Ch. Klatt ◽  
W. Ensinger
Keyword(s):  
Silicon Carbide ◽  
Ir Spectroscopy ◽  
Ion Implantation ◽  
Depth Profile ◽  
High Voltage ◽  
Chemical Binding ◽  
Composition And Structure ◽  
Plasma Immersion Ion Implantation

ABSTRACTHydrocarbon ions are implanted into silicon by pulse biasing Si to a high voltage of -45 kV in a methane plasma. The resulting SiCx:H films are examined with respect to their composition and chemical binding by RBS, NRA and IR spectroscopy. The process may yield all C/Si ratios, up to pure C films. The H depth profile is shown to be strongly governed by the C depth profile. Silicon carbide bonding as well as C–H bonds can be proven in the implanted region.

TiN/ZrO2 multilayers synthesized on GCr15 bearing steel using plasma immersion ion implantation and deposition

2007 ◽  
Vol 201 (15) ◽  
pp. 6615-6618 ◽  
Author(s):  
Tao Sun ◽  
Langping Wang ◽  
Yonghao Yu ◽  
Yuhang Wang ◽  
Xiaofeng Wang ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Bearing Steel ◽  
Gcr15 Bearing Steel ◽  
Plasma Immersion Ion Implantation
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